Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Preparation of Si(Al)ON Precursor Using Organoaluminum Imine and Poly (Phenyl Carbosilane), and the Compositional Change of the Film with Different Heat Treatment Condition

  • Lee, Yoonjoo (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Shin, Dong-Geun (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Kwon, Woo Teck (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Soo Ryong (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Kim, Younghee (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology)
  • Received : 2015.06.22
  • Accepted : 2015.07.13
  • Published : 2015.07.31
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Abstract

Si(Al)ON precursor was synthesized by formation of new Si-N bond using organoaluminum imine and liquid type poly(phenyl carbosilane). It was decomposed between $200-600^{\circ}C$, and the ceramic yield was 51% after pyrolysis. 150 - 200 nm in thickness of coating film was obtained by spin coating method. The precursor was easily oxidized during process because it was unstable in air. However the oxygen content was limited to 0.5 - 0.7 to silicon in heat treatment step. Even though the content of nitrogen was decreased by pyrolysis, Al-N and Si-N bonds were formed in ammonia atmosphere, and Si(Al)ON film was formed with 0.2 in content to silicon.

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References

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