References
- Lorenz, H. P., Vaccum Technology, In Ullmann's Encyclopedia of Industrial Chemistry, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim(2000).
- Previti, M. and Gilleo, K., "Getters: Micromolecular Scavengers for Packaging," Proceedings of International Symposium on Advanced Packaging Materials: Processes, Properties and Interfaces, March, Georgia(2001).
- Niklaus, F., Vieider, C. and Jakobsen, H., "MEMS-based Uncooled Infrared Bolometer Arrays: A Review," Proceedings of MEMS/MOEMS Technologies and Applications III, November, Beijing (2007).
- http://www.onboard-technology.com/pdf_febbraio2005/020509.pdf.
- Ramesham, R. and Kullberg, R. C., "Review of Vacuum Packaging and Maintenance of MEMS and the Use of Getters Therein," J. Micro-Nanolithogr. MEMS MOEMS, 8(3), 031307(2009). https://doi.org/10.1117/1.3158064
- Chuntonov, K. A. and Yatsenko, S. P., "Getter Films for Small Vacuum Chambers," Recent Patents on Materials Science, 6(1), 29-39(2013). https://doi.org/10.2174/1874464811306010029
- Lee, W. and Park, S.-J., "Porous Anodic Aluminum Oxide: Anodization and Templated Synthesis of Functional Nanostructures," Chem. Rev., 114(15), 7487-7556(2014). https://doi.org/10.1021/cr500002z
- Ono, S., Ichinose, H. and Masuko, N., "The High Resolution Observation of Porous Anodic Films Formed on Aluminum in Phosphoric Acid Solution," Corrosion Sci., 33(6), 841-850(1992). https://doi.org/10.1016/0010-938X(92)90048-8
- Yao, L., Zheng, M., Li, H., Ma, L. and Shen, W., "High-performance Humidity Sensors Based on High-field Anodized Porous Alumina Films," Nanotechnology., 20(39), 395501(2009). https://doi.org/10.1088/0957-4484/20/39/395501
- Hideki, M. and Masahiro, S., "Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation Mask," Jpn. J. Appl. Phys., 35(1B), L126-L129(1996). https://doi.org/10.1143/JJAP.35.L126
- Hwang, S.-K., Jeong, S.-H., Hwang, H.-Y., Lee, O.-J. and Lee, K.-H., "Fabrication of Highly Ordered Pore Array in Anodic Aluminum Oxide," Korean J. Chem. Eng., 19(3), 467-473(2002). https://doi.org/10.1007/BF02697158
-
Sanz, O., Echave, F. J., Odriozola, J. A. and Montes, M., "Aluminum Anodization in Oxalic Acid: Controlling the Texture of
$Al_2O_3$ /Al Monoliths for Catalytic Aplications," Ind. Eng. Chem. Res., 50(4), 2117-2125(2011). https://doi.org/10.1021/ie102122x - Crouse, D., Lo, Y.-H., Miller, A. and Crouse, M., "Self-ordered Pore Structure of Anodized Aluminum on Silicon and Pattern Transfer," Appl. Phys. Lett., 76(1), 49-51(2000). https://doi.org/10.1063/1.125652
- Rabin, O., Herz, P. R., Lin, Y. M., Akinwande, A. I., Cronin, S. B. and Dresselhaus, M. S., "Formation of Thick Porous Anodic Alumina Films and Nanowire Arrays on Silicon Wafers and Glass," Adv. Funct. Mater., 13(8), 631-638(2003). https://doi.org/10.1002/adfm.200304394
- Yang, Y., Chen, H., Mei, Y., Chen, J., Wu, X. and Bao, X., "Anodic Alumina Template on Au/Si Substrate and Preparation of CdS Nanowires," Solid State Commun., 123(6), 279-282(2002). https://doi.org/10.1016/S0038-1098(02)00304-6
- Myung, N. V., Lim, J., Fleurial, J.-P., Yun, M., West, W. and Choi, D., "Alumina Nanotemplate Fabrication on Silicon Substrate," Nanotechnology, 15(7), 833(2004). https://doi.org/10.1088/0957-4484/15/7/021
- Henry, M. S. and James R. S., "Hydrogen and Moisture Getter and Absorber for Sealed Devices," U.S. Patent No. 5,888,925(1999).
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