Applied Science and Convergence Technology

한국진공학회 (The Korean Vacuum Society)
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Analysis of Pumping Characteristics of a Multistage Roots Pump

  • In, S.R. (Korea Atomic Energy Research Institute) ;
  • Kang, S.P. (Woosung Vacuum Co. Ltd.)
  • 투고 : 2014.12.31
  • 심사 : 2015.01.30
  • 발행 : 2015.01.30
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초록

The practical pumping speed of a dry pump is considerably lower than the intrinsic speed because of back-streaming through finite gaps of the rotor assembly. The maximum compression ratio and the ultimate pressure of the pump are also directly influenced by the back-streaming rate. Therefore, information on the gap conductance, which determines the back-streaming characteristics of the rotor assembly, is the most important key for estimating the pumping performance of a dry pump. In this paper, the feasibility of calculating analytically the pumping performance of a multi-stage Roots pump, one of the most popular types of dry pumps, by quantifying the gap conductance in a rational way, is discussed.

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참고문헌

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