반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

탄소 나노튜브가 코팅된 은 메탈-메쉬 전극의 특성

Characteristics of Silver Metal-mesh Electrodes Coated by Carbon Nanotubes

  • 김부종 (한양대학교 전자시스템공학과) ;
  • 박종설 (한양대학교 전자시스템공학과) ;
  • 황영진 (한양대학교 전자시스템공학과) ;
  • 박진석 (한양대학교 전자시스템공학과)
  • Kim, Bu-Jong (Dept. of Electronic Systems Engineering, Hanyang University) ;
  • Park, Jong-Seol (Dept. of Electronic Systems Engineering, Hanyang University) ;
  • Hwang, Young-Jin (Dept. of Electronic Systems Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic Systems Engineering, Hanyang University)
  • 투고 : 2015.03.03
  • 심사 : 2015.03.23
  • 발행 : 2015.03.31
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초록

This study demonstrates hybrid-type transparent electrodes for touch screen panels. The hybrid-type electrodes were fabricated by coating carbon nanotubes (CNTs) on metal meshes. To form the metal-meshes, thin films of silver (Ag) were deposited on glass substrates using the sputtering method and then patterned via photolithography to obtain mesh structures whose line width was $10{\mu}m$ and line-to-line spacing was $300{\mu}m$. CNTs were coated on Ag-meshes by using two different methods, such as spray coating and electrophoretic deposition (EPD). For the samples of a Ag-meshes and CNTs-coated Ag-meshes, their surface morphologies, electrical sheet resistances, and visible-range transmittances and reflectances were characterized and compared. The experimental results indicated that the reflectance of Ag-mesh electrodes was substantially reduced by coating of CNTs. Especially, the hybrid electrodes of Ag-meshes with EPD-coated CNTs showed excellent properties such as sheet resistance lower than $20{\Omega}/{\Box}$, transmittance higher than 90 %, and reflectance lower than 8%.

키워드

참고문헌

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