Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Structural and Optical Properties of ITZO Deposited by RF Magnetron Sputtering

RF 마그네트론 스퍼터링 법으로 제작한 ITZO 박막의 구조 및 광학적 특성

  • Kim, Dong Ryeol (Department of Materials Science and Engineering, Pusan National University) ;
  • Bae, Ji Hwan (Department of Materials Science and Engineering, Pusan National University) ;
  • Hwang, Dong Hyun (Department of Materials Science and Engineering, Silla University) ;
  • Son, Young Guk (Department of Materials Science and Engineering, Pusan National University)
  • 김동렬 (부산대학교 재료공학부) ;
  • 배지환 (부산대학교 재료공학부) ;
  • 황동현 (신라대학교 신소재공학과) ;
  • 손영국 (부산대학교 재료공학부)
  • Received : 2015.11.30
  • Accepted : 2015.12.29
  • Published : 2015.12.31
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Abstract

Indium tin zinc oxide (ITZO) thin films were deposited on glass and quartz substrates by RF magnetron sputtering. The substrate temperature varied from $100^{\circ}C$ to $400^{\circ}C$. The structural and optical properties of thin films were investigated by X-ray diffraction (XRD), Field Emission Scanning electron microscopy (FESEM) and UV-Visible transmission spectra. It has been found from X-ray diffraction patterns that increasing the substrate temperature, the amorphous structure changes into polycrystalline structure. The FESEM results showed that all ITZO thin films have a smooth surface. The average optical transmittance (400 - 800 nm) was 82% and 80% at all films deposited at $200^{\circ}C$. The band gap energy ranges 3.41 to 3.57eV and 2.81 to 3.44eV with a maximum value at $200^{\circ}C$ all substrates temperature.

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