한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제52권6호
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  • Pages.435-440
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  • 2015
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  • 1229-7801(pISSN)
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  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
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Optimization of Binder Burnout for Reaction Bonded Si3N4 Substrate Fabrication by Tape Casting Method

  • Park, Ji Sook (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Hwa Jun (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Ryu, Sung Soo (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Sung Min (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology) ;
  • Hwang, Hae Jin (Department of Materials Science and Engineering, Inha University) ;
  • Han, Yoon Soo (Engineering Ceramic Team, Korea Institute of Ceramic Engineering and Technology)
  • 투고 : 2015.08.29
  • 심사 : 2015.10.07
  • 발행 : 2015.11.30
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초록

It is a challenge from an industrial point of view to fabricate silicon nitride substrates with high thermal conductivity and good mechanical properties for power devices from high-purity Si scrap powder by means of thick film processes such as tape casting. We characterize the residual carbon and oxygen content after the binder burnout followed by nitridation as a function of the temperature in the temperature range of $300^{\circ}C-700^{\circ}C$ and the atmosphere in a green tape sample which consists of high-purity Si powder and polymer binders such as polyvinyl butyral and dioctyl phthalate. The optimum condition of binder burnout is suggested in terms of the binder removal temperature and atmosphere. If considering nitridation, the burnout of the organic binder in air compared to that in a nitrogen atmosphere could offer an advantage when fabricating reaction-bonded $Si_3N_4$ substrates for power devices to enable low carbon and oxygen contents in green tape samples.

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참고문헌

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피인용 문헌

  1. Effects of Debinding Atmosphere on Properties of Sintered Reaction-bonded Si3N4 Prepared by Tape Casting Method vol.53, pp.6, 2016, https://doi.org/10.4191/kcers.2016.53.6.622
  2. Microstructure and Mechanical Properties of β-SiAlON Ceramics Fabricated Using Self-Propagating High-Temperature Synthesized β-SiAlON Powder vol.54, pp.4, 2017, https://doi.org/10.4191/kcers.2017.54.4.06
  3. Efficacy of Ag–CuO Filler Tape for the Reactive Air Brazing of Ceramic–Metal Joints vol.55, pp.5, 2018, https://doi.org/10.4191/kcers.2018.55.5.05
  4. Sintering Behavior and Properties of Reaction-Bonded Silicon Nitride vol.94, pp.2, 2021, https://doi.org/10.1134/s1070427221020038