참고문헌
- G. Wilkening and L. Koenders, Nanoscale Calibration Standards and Methods (Wiley-VCH Verlag GmbH & Co., KGaA, 2005) p. 311.
- A. A. Tseng, Nanofabrication Fundamentals and Applications (World Scientific, New Jersey, 2008) p. 544.
- J. P. Biersack, S. Berg, and C. Nender, Nucl. Instrum. Methods B, 59, 21 (1991).
- W. Moller, W. Eckstein, and J. P. Biersack, Comp. Phys. Commun., 51, 355, (1998).
- J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
- W. Moller and W. Eckstein, Nucl. Insrum. Methods B, 2, 814, (1984). https://doi.org/10.1016/0168-583X(84)90321-5
- W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, Berlin 1991).
- B. I. Prenitzer, C. A. Urbanik-Shannon, L. A. Giannuzzi, S. R. Brown, R. B. Irwin, T. L. Shofner, and F. A. Stevie, Microscopy and Microanalysis, 9, 216 (2003). DOI:10.1017/S1431922760030034
- C. Lehrer, L. Frey, M. Mizutani, M. Takai, and H. Ryssel, Ion Implantation Technology Conference (IEEE, Alpbach, 2000) p. 695.
- H. Gnaser, A. Brodyanski, and B. Reuscher, Surf. Interface Anal., 40, 1415 (2008). https://doi.org/10.1002/sia.2915
- J. P. McCaffrey, M. W. Phaneuf, and L. D. Madsen, Ultramicroscopy, 87, 97 (2001). https://doi.org/10.1016/S0304-3991(00)00096-6
- K. S. Ko, W. C. Jung, J. Chung, and L. Rabenberg, Microsc Microanal, 10, 1170 (2004). https://doi.org/10.1017/S1431927604884277
- Z. Wang, T. Kato, T. Hirayama, N. Kato, K. Sasaki, and H. Saka, Appl. Surf. Sci., 241, 80 (2005). https://doi.org/10.1016/j.apsusc.2004.09.092
- J. Takamatsu, T. Koike, Y. Kato, H. Sunaoshi, and K. Hattori, Jpn. J. Appl. Phys., 35, 6415 (1996). https://doi.org/10.1143/JJAP.35.6415
- C. J. Anthony, G. Torricelli, P. D. Prewett, D. Cheneler, C. Binns, and A. Sabouri, J. of Micromech. and Microeng., 21, 1 (2011).
- J. Orloff, M. Utlau, and L. Swanson, High Resolution Focused Ion Beams (Kluwer Academic Pub., New York, 2003) p. 205.
- Y. Liao, Practical Electron Microscopy and Data Base, 2454 (2007).