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Fabrication of Viewing Angle Direction Brightness-Enhancement Optical Films using Surface Textured Silicon Wafers

  • Jang, Wongun (3D Convergence R&D Center, Korea Photonics Technology Institute) ;
  • Shim, Hamong (3D Convergence R&D Center, Korea Photonics Technology Institute) ;
  • Lee, Dong-Kil (3D Convergence R&D Center, Korea Photonics Technology Institute) ;
  • Park, Youngsik (3D Convergence R&D Center, Korea Photonics Technology Institute) ;
  • Shin, Seong-Seon (Department of Photonic Engineering, Chosun University) ;
  • Park, Jong-Rak (Department of Photonic Engineering, Chosun University) ;
  • Lee, Ki Ho (Research Center of i-components Inc.) ;
  • Kim, Insun (FORIS Co. Ltd.)
  • Received : 2014.07.04
  • Accepted : 2014.09.26
  • Published : 2014.10.25

Abstract

We demonstrate a low-cost, superbly efficient way of etching for the nano-, and micro-sized pyramid patterns on (100)-oriented Si wafer surfaces for use as a patterned master. We show a way of producing functional optical films for the viewing angle direction brightness-enhancement of Lambertian LED (light emitting diode)/OLED (organic light emitting diode) planar lighting applications. An optimally formulated KOH (Potassium hydroxide) wet etching process enabled random-positioned, and random size-distributed (within a certain size range) pyramid patterns to be developed over the entire (100) silicon wafer substrates up to 8" and a simple replication process of master patterns onto the PC (poly-carbonate) and PMMA (poly-methyl methacrylate) films were performed. Haze ratio values were measured for several film samples exhibiting excellent values over 90% suitable for LED/OLED lighting purposes. Brightness was also improved by 13~14% toward the viewing angle direction. Computational simulations using LightTools$^{TM}$ were also carried out and turned out to be in strong agreement with experimental data. Finally, we could check the feasibility of fabricating low-cost, large area, high performance optical films for commercialization.

Keywords

References

  1. L. Lin, T. K. Shia, and C. J. Chiu, "Silicon-processed plastic micro- pyramids for brightness enhancement applications," J. MicroMech. MicroEng. 10, 395-400 (2000). https://doi.org/10.1088/0960-1317/10/3/314
  2. U. Pettersson and S. Jacobson, Tribology International 39, 695-700 (2006). https://doi.org/10.1016/j.triboint.2005.06.004
  3. W. Sun, T. C. Tien, J. Pan, T. Yang, C. Tsuei, and Y. Huang, "Simulation and comparison of the lighting efficiency for household illumination with LEDs and fluorescent lamps," J. Opt. Soc. Korea 17, 376-383 (2013). https://doi.org/10.3807/JOSK.2013.17.5.376
  4. B.-Y. Jo and J.-H. Ko, "Analysis of color uniformity of white LED lens packages for direct-lit LCD backlight applications," J. Opt. Soc. Korea 17, 506-512 (2013). https://doi.org/10.3807/JOSK.2013.17.6.506
  5. P. Campbell and M. A. Green, "High performance light trapping textures for monocrystalline silicon solar cells," J. Appl. Phys. 62, 243-249 (1987). https://doi.org/10.1063/1.339189
  6. J. M. Rodriguez, I. Tobias, and A. Luque, "Random pyramidal texture modelling," Solar Energy Materials and Solar Cells 45, 241-253 (1997). https://doi.org/10.1016/S0927-0248(96)00040-2
  7. T. Yagi, Y. Uraoka, and T. Fuyuki, "Ray-trace simulation of light trapping in silicon solar cell with texture structures," Solar Energy Materials and Solar Cells 90, 2647-2656 (2006). https://doi.org/10.1016/j.solmat.2006.02.031
  8. P. A. Basore, "Numerical modeling of textured silicon solar cells using PC-1D," IEEE Tr. El. Devices 37, 337-343 (1990). https://doi.org/10.1109/16.46362
  9. E. D. Palik, O. J. Glembocki, I. Heard, P. S. Burno, and L. Tenerz, "Etching roughness for (100) silicon surfaces in aqueous KOH," J. Appl. Phys. 70, 3291-3300 (1991). https://doi.org/10.1063/1.349263
  10. Q. B. Vu, D. A. Stricker, and P. M. Zavracky, "Surface characteristics of (100) silicon anisotropically etched in aqueous KOH," J. Electrochem. Soc. 143, 1372-1375 (1996). https://doi.org/10.1149/1.1836644
  11. R. A. Arndt, J. F. Allison, J. G. Haynos, and A. Meulenberg, Jr., "Optical properties of the COMSAT non-reflective cell," in Proc. 11th IEEE International Photovoltaic Specialists Conference (New York, USA, 1975), pp. 40-43.
  12. J.-Q. Xi, H. Luo, A. J. Pasquale, J. K. Kim, and E. F. Schubert, "Enhanced light extraction in GaInN light-emitting diode with pyramid reflector," IEEE Photon. Technol. Lett. 18, 2347-2349 (2006). https://doi.org/10.1109/LPT.2006.885210
  13. P. Verlinden, O. Evrard, E. Muzy, and A. Crahay, "The surface texturization of solar cells: A New. Method using V-grooves with controllable sidewall," Energy Materials and Solar Cells 26, 71-78 (1992). https://doi.org/10.1016/0927-0248(92)90126-A
  14. D. L. King and M. E. Buck, "Experimental optimization of an anisotropic etching process for random texturization of silicon solar cells," in Proc. 22nd IEEE International Photovoltaic Specialists Conference (Las Vegas, USA, 1991), vol. 1, pp. 303-308.
  15. J. Zhu, Z. Yu, G. F. Burkard, C. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, "Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays," Nano Letters 9, 279-282 (2009). https://doi.org/10.1021/nl802886y