Journal of the Korea Academia-Industrial cooperation Society (한국산학기술학회논문지)

The Korea Academia-Industrial cooperation Society (한국산학기술학회)
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Effect of alumina coating on the Pull-in Voltage in Electrostatically actuated micro device

알루미나 코팅이 정전기적 구동의 마이크로 소자의 풀 인 전압에 미치는 영향

  • Park, Hyun-Sik (Department of Electrical, Electronic and Control Engineering, Graduate School of Future Convergence Technology, Institute for information technology convergence, Hankyong National University)
  • 박현식 (한경대학교 전기전자제어공학과, 미래융합기술대학원, IT융합기술연구소)
  • Received : 2014.05.27
  • Accepted : 2014.09.11
  • Published : 2014.09.30
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Abstract

Electrostatically-actuated Micro device have been used widely in a variety of integrated sensors and actuators. Electrostatically-actuated micro devices with a gap of several micrometers or less between the electrodes have shown failure problems by electrostatic adhesion. To improve this adhesion phenomenon, micro devices of varying lengths and widths in electrodes were fabricated, and an alumina coating was then deposited using atomic layer deposition technology. The effects of improving adhesion phenomenon were compared by measuring the pull-in voltage before and after the coating process. The pull-in voltage increased with increasing length of the upper electrode after the coating. An increase in the electrode area results in an increase in the pull-in voltage after coating. The alumina coating method applied to improve the adhesion on an electrostatically-actuated micro device was observed as an effective method.

정전기적으로 구동되는 마이크로 소자는 센서 및 엑츄에이터 산업 분야에서 널리 활용되고 있다. 정전기적으로 구동되는 마이크로 소자 구조체는 수 마이크로미터 이하의 전극 사이 간격으로서 정전기적인 부착 현상에 의한 고장이 발생 한다. 본 연구에서는 마이크로 소자의 부착 현상을 개선하기위하여 전극의 길이와 면적을 달리한 마이크로 소자의 구조체를 제작하고, 원자 층 증착방법에 의한 알루미나 코팅 전과 후의 마이크로 소자의 풀인 전압(pull-in voltage)을 측정 비교 분석 하였다. 마이크로 소자의 상부 전극 길이 변화에서는 알루미나 코팅 후에 풀인 전압의 상승이 관찰되었고 전극면적이 클수록 풀인 전압 상승이 관찰되었다. 정전기적으로 구동되는 마이크로 소자의 부착 현상을 개선하기위한 방안으로 본 연구에서 적용된 알루미나 코팅 방법은 효과적인 방법이다.

Keywords

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