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http://dx.doi.org/10.5762/KAIS.2014.15.9.5758

Effect of alumina coating on the Pull-in Voltage in Electrostatically actuated micro device  

Park, Hyun-Sik (Department of Electrical, Electronic and Control Engineering, Graduate School of Future Convergence Technology, Institute for information technology convergence, Hankyong National University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.15, no.9, 2014 , pp. 5758-5762 More about this Journal
Abstract
Electrostatically-actuated Micro device have been used widely in a variety of integrated sensors and actuators. Electrostatically-actuated micro devices with a gap of several micrometers or less between the electrodes have shown failure problems by electrostatic adhesion. To improve this adhesion phenomenon, micro devices of varying lengths and widths in electrodes were fabricated, and an alumina coating was then deposited using atomic layer deposition technology. The effects of improving adhesion phenomenon were compared by measuring the pull-in voltage before and after the coating process. The pull-in voltage increased with increasing length of the upper electrode after the coating. An increase in the electrode area results in an increase in the pull-in voltage after coating. The alumina coating method applied to improve the adhesion on an electrostatically-actuated micro device was observed as an effective method.
Keywords
Adhesion; Alumina; Coating; Micro deice; Pull-in voltage;
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