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Deposition and XPS Study of Pb, Zr, and Ti Films

  • 투고 : 2014.07.14
  • 심사 : 2014.07.29
  • 발행 : 2014.09.30

초록

Lead zirconate titanate (PZT) is significant material in electrical and optical devices for their ferroelectric, piezoelectric and dielectric properties. In this research, PZT films were fabricated by reactive RF co-sputtering method using Pb, Zr, and Ti targets. From XPS study, lead, zirconium, and titanium are successfully deposited on Si(100) substrate. Thickness of PZT films was measured with a surface profiler and the thickness was decreased as the oxygen gas ratio increased in the sputter gas.

키워드

참고문헌

  1. A. Bose and M. Sreemany, "Influence of processing conditions on the structure, composition and ferroelectric properties of sputtered PZT thin films on Tisubstrate", Appl. Surf. Sci., Vol. 289, pp. 551-559, 2014. https://doi.org/10.1016/j.apsusc.2013.11.041
  2. F. Chen, R. Schafranek, S. Li, W. B. Wu, and A. Klein, "Energy band alignment between Pb(Zr,Ti) $O_3$ and high and low work function conducting oxides-from hole to electron injection", J. Phys. D. Appl. Phys., Vol. 43, p. 295301, 2010. https://doi.org/10.1088/0022-3727/43/29/295301
  3. M. M. Zhu, Z. H. Du, and J. Ma, "Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films", AIP Adv., Vol. 1, p. 042144, 2011. https://doi.org/10.1063/1.3664137
  4. A. Bose, S. Bysakh, M. Mukherjee, A. K. M. Maidul Islam, A. K. Balamurugan, and S. Sen, "Characterization of RF sputter-deposited ultra thin PZT films and its interface with substrate", Integr. Ferroelectr., Vol. 120, pp. 37-48, 2010. https://doi.org/10.1080/10584587.2010.491726
  5. A. Etin, G. E. Shter, R. Brener, S. Baltianski, and G. S. Grader, "Surface composition and imprint in CSD-based PZT films", J. Am. Ceram. Soc., Vol. 90, pp. 3800-3803, 2007.
  6. A. Bose, M. Sreemany, and S. Bysakh, "Influence of processing parameters on the growth characteristics and ferroelectric properties of sputtered PZT thin films on stainless steel substrate", Appl. Surf. Sci., Vol. 282, pp. 202-2210, 2013. https://doi.org/10.1016/j.apsusc.2013.05.103
  7. P. J. Schorn, P. Gerber, U. Boettger, R. Waser, G. Beitel, N. Nagel, and R. Bruchhaus, "New results on fatigue and imprint effect", Integr. Ferroelectr., Vol. 73, pp. 83-92, 2005. https://doi.org/10.1080/10584580500413731
  8. E. Jabbari and N. A. Peppas, "A model for interdiffusion at interfaces of polymers with dissimilar physical properties", Polymer, Vol. 36, pp. 575-586, 1995. https://doi.org/10.1016/0032-3861(95)91567-Q
  9. S. B. Hashim, N. H. Mahzan, S. H. Herman, and M. Rusop, "Room-temperature deposition of silicon thin films by rf magnetron sputtering", Adv. Mat. Res., Vol. 576, pp. 543-547, 2012. https://doi.org/10.4028/www.scientific.net/AMR.576.543
  10. C.-H. Park, Y.-G. Son, and M.-S. Won, "Microctructure and ferroelectric properties of R.F. magnetron sputtering derived PZT thin films deposited on inerlayer (PbO/$TiO_2$)", Microchem. J., Vol. 80, pp. 201-206, 2005. https://doi.org/10.1016/j.microc.2004.07.012

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