참고문헌
- C. C. Koch, D. G. Morris, K. Lu, A. Inoue, MRS Bul., 24 (1999) 146.
- A. A. Voevodin, J. S. Zabinski, Thin Solid Films, 370 (2000) 223. https://doi.org/10.1016/S0040-6090(00)00917-2
- K. H. Kim, S. R. Choi, S. Y. Yoon, Surf. Coat. Technol., 298 (2002) 243.
- S. Veprek, J. Vac. Sic. Technol. A, 17 (1999) 2401. https://doi.org/10.1116/1.581977
- J. Musil, Surf. Coat. Technol., 125 (2000) 322. https://doi.org/10.1016/S0257-8972(99)00586-1
- E. Lugscheider, C. Barimani, C. Wolff, S. Guerreiro, G. Doepper, Surf. Coat. Technol., 86-87 (1996) 177. https://doi.org/10.1016/S0257-8972(96)03041-1
- J. H. Jung, J. H. Yang, H. S. Park, M. A Song, J. I. Jeong, J. Kor. Inst. Surf. Eng., 45 (2012) 104.
- D. Yu, C. Wang, X. Cheng, F. Zhang, Appl. Surf. Sci., 255 (2008) 1865. https://doi.org/10.1016/j.apsusc.2008.06.204
- I. W. Park, S. R. Choi, J. H. Suh, C. G. Park, K. H. Kim, Thin Solid Films, 447-448 (2004) 443. https://doi.org/10.1016/S0040-6090(03)01122-2
- J. S. Kim, G. J. Kim, M. C. Kang, J. W. Kim, K. H. Kim, Surf. Coat. Technol., 193 (2005) 249. https://doi.org/10.1016/j.surfcoat.2004.07.019
- D. Philippon, V. Godinho, P.M. Nagy, M.P. Delplancke-Ogletree, A. Fernandez, Wear, 270 (2011) 541. https://doi.org/10.1016/j.wear.2011.01.009
- S. Y. Yoon, S. R. Choi, M. H. Lee, K. H. Kim, J. Kor. Inst. Surf. Eng., 36 (2003) 122.
- F. Lang, Z. Yu, Surf. Coat. Technol., 145 (2001) 80. https://doi.org/10.1016/S0257-8972(01)01284-1
- P. J. Martin, A. Bendavid, J.M. Cairney, M. Hoffman, Surf. Coat. Technol., 200 (2005) 2228. https://doi.org/10.1016/j.surfcoat.2004.06.012
- Th. H. De Keijser, J. I. Langford, E. J. Melterneijer, A. B. P. Vogels, J. Appl. Cryst., 15 (1982) 308. https://doi.org/10.1107/S0021889882012035
- Y. Y. Chang, S. M. Yang, Thin Solid Films, 518 (2010) S34. https://doi.org/10.1016/j.tsf.2010.03.020
피인용 문헌
- Properties of AlTiN Films Deposited by Cathodic Arc Deposition vol.49, pp.3, 2016, https://doi.org/10.5695/JKISE.2016.49.3.307