한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제24권3호
  • /
  • Pages.127-132
  • /
  • 2014
  • /
  • 1225-1429(pISSN)
  • /
  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지
DOI QR코드

DOI QR Code

Y2O3-BN 복합체의 미세구조 및 내플라즈마 특성

Microstructure and plasma resistance of Y2O3-BN composites

  • 이현규 (조선대학교 신소재공학과) ;
  • 이석신 (조선대학교 기계공학과) ;
  • 김비룡 (조선대학교 신소재공학과) ;
  • 박태언 ((주)에코텍코리아, 세라믹종합지원센터) ;
  • 윤영훈 (동신대학교 수소에너지학과)
  • Lee, Hyun-Kyu (Dept. of New Material Engineering, Chosun University) ;
  • Lee, Seokshin (Dept. of Mechanical Engineering, Chosun University) ;
  • Kim, Bi-Ryong (Dept. of New Material Engineering, Chosun University) ;
  • Park, Tae-Eon (Ecotechkorea Co., LTD, Jeonnam Advanced Ceramics Center) ;
  • Yun, Young-Hoon (Dept. of Hydrogen & Fuel Cell Tech., Dongshin University)
  • 투고 : 2014.06.03
  • 심사 : 2014.06.18
  • 발행 : 2014.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

$Y_2O_3$-BN 세라믹 복합체를 제작하기 위해서, 분말 입도 $3{\sim}10{\mu}m$인 $Y_2O_3$ 분말을 분산한 슬러리에 pH 조절제인 NaOH를 첨가하였으며 결합제로는 PVA, 가소제로는 PEG를, BN 분말과 혼합하고, 분무건조(spray drying)공정을 거쳐 $Y_2O_3$ 혼합 분말을 제조하였다. ${\O}14mm$ 크기의 $Y_2O_3$-BN 시편을 성형하고, $1550^{\circ}C$ 및 $1600^{\circ}C$에서 소결하여 $Y_2O_3$-BN 복합체를 제작하였다. BN 투입량과 소결온도의 변수에 따른 미세구조, 순도, 꺽임강도, 열팽창계수, 밀도, 체적저항, 내플라즈마 특성을 조사하였다.

$Y_2O_3$-BN ceramic composites were fabricated from the slurries of yttria powder with average particle size of 3~10 ${\mu}m$. The slurry was fabricated by mixing PVA binder, NaOH for Ph control, PEG, BN powder and $Y_2O_3$ powder. The mixed $Y_2O_3$ powders were obtained by spray drying process from the slurry. The $Y_2O_3$-BN composite specimen was shaped in size of ${\O}14mm$ and then sintered at $1550^{\circ}C$ and $1600^{\circ}C$, respectively. The characteristics, microstructure, purities, densities, bulk resistance, thermal expansion, hardness and plasma resistance of the $Y_2O_3$-BN composites were investigated with the function of BN contents and sintering temperature.

키워드

참고문헌

  1. M. Kodo, K. Soga, H. Yoshida and T. Yamamoto, "Doping effect of divalent cations on sintering of polycrystalline yttria", J. Eur. Ceram. Soc. 30(13) (2010) 2741. https://doi.org/10.1016/j.jeurceramsoc.2010.05.028
  2. R. Chaima, A. Shlayer and C. Estournes, "Densification of nanocrystalline Y2O3 ceramic powder by spark plasma sintering", J. Eur. Ceram. Soc. 29(1) (2009) 91. https://doi.org/10.1016/j.jeurceramsoc.2008.05.043
  3. L. Ana, A. Ito and T. Goto, "Transparent yttria produced by spark plasma sintering at moderate temperature and pressure profiles", J. Eur. Ceram. Soc. 32(5) (2012) 1035. https://doi.org/10.1016/j.jeurceramsoc.2011.11.023
  4. Y. Kobayashi, "Current status and needs in the future of ceramics used for semiconductor production equipment", p.17, Osaka, Japan, July, 2005, The 37th Seminar on High Temperature Ceramics (2005).
  5. N. Ito, T. Moriya, F. Uesugi, M. Matsumoto, S. Liu and Y. Kitayama, "Reduction of particle contamination in plasma-etching equipment by dehydration of chamber wall", Jpn. J. Appl. Phys., PartI 47(5) (2008) 3630. https://doi.org/10.1143/JJAP.47.3630
  6. H. Di, Z. Yanchun, S. Xudong, L. Xiaodon and L. Shaohong, "Preparation of transparent $Y_2O_3$ ceramic by slip casting and vacuum sintering", J. Rare Earth 30(1) (2012) 57. https://doi.org/10.1016/S1002-0721(10)60639-4
  7. X. Qin, H. Yang, G. Zhou, D. Luo, J. Zhang, S. Wang and J. Mad, "Synthesis of submicron-sized spherical $Y_2O_3$ powder for transparent YAG ceramics", Mater. Res. Bull. 46(2) (2011) 170. https://doi.org/10.1016/j.materresbull.2010.11.023
  8. P. Duran, J. Tartaj and C. Moure, "Sintering behaviour of $Y_2O_3$ powders prepared by the polymer complex solution method", Ceram Inter. 28(7) (2002) 791. https://doi.org/10.1016/S0272-8842(02)00045-7
  9. J.H. Han, "Synthesis of sinter-active $Y_2O_3$ powders using Urea", J. Kor. Ceram. Soc. 34(12) (1997) 1247.
  10. P. Merkert, H. Hahn and J. Rodel, "Sintering behavior of nanocrystalline $Y_2O_3$", Nanostructured Mater. 12(5-8) (1999) 701. https://doi.org/10.1016/S0965-9773(99)00221-4
  11. J. Luo, Z. Zhong and J. Xu, "Yttrium oxide transparent ceramics by low-temperature microwave sintering", Mater. Res. Bull. 47(12) (2012) 4283. https://doi.org/10.1016/j.materresbull.2012.09.017
  12. J. Iwasawa, R. Nishimizu, M. Tokita, M. Kiyohara and K. Uematsu, "Plasma resistance dense yttrium oxide film prepared by aerosol deposition process", J. Am. Ceram. Soc. 90(8) (2007) 2327. https://doi.org/10.1111/j.1551-2916.2007.01738.x
  13. J.S. Choi, T. Nakayama and W.T. Bae, "Plasma resistance evaluation and characteristics of Yttria ceramics sintered by using calcination Yttria", J. Kor. Ceram. Soc. 50(5) (2013) 348. https://doi.org/10.4191/kcers.2013.50.5.348
  14. X. Chenga, C. Yuana, N.R. Greena and P.A. Withey, "Sintering mechanisms of Yttria with different additives", Ceram Inter. 39(5) (2013) 4791. https://doi.org/10.1016/j.ceramint.2012.11.069
  15. I. Takayuki and K. Masakatsu, "Sintered yttria, anti-corrosion member and process for producing the same", Korean patent, Registration No.1009201040000 (2009).