한국정보통신학회논문지 (Journal of the Korea Institute of Information and Communication Engineering)

  • 제18권6호
  • /
  • Pages.1407-1412
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  • 2014
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  • 2234-4772(pISSN)
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  • 2288-4165(eISSN)
한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
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Silicon기반 고감도 PIN Photodiode의 전기적 및 광학적 특성 분석

Analysis of Electrical and Optical Characteristics of Silicon Based High Sensitivity PIN Photodiode

  • Lee, Jun-Myung (Department of Information and Communication Engineering, Wonkwang University) ;
  • Kang, Eun-Young (Department of Information and Communication Engineering, Wonkwang University) ;
  • Park, Keon-Jun (Department of Information and Communication Engineering, Wonkwang University) ;
  • Kim, Yong-Kab (Department of Information and Communication Engineering, Wonkwang University) ;
  • Hoang, Geun-Chang (Department of Microelectronics and Display Technology, Wonkwang University)
  • 투고 : 2014.04.14
  • 심사 : 2014.06.09
  • 발행 : 2014.06.30
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초록

근적외선 파장대역 850 nm ~ 1000 nm에서 레이저를 검출하기 위해 포토다이오드의 분광감응도를 향상시키고자 본 논문에서 실리콘 기반 고감도 PIN 포토 다이오드를 제작하고 전기적 및 광학적 특성을 분석하였다. 제작된 소자는 TO-18형으로 패키징 하였고 포토다이오드의 전기적 특성으로 역 바이어스 전압이 5V일 때 암전류는 Anode 1과 Anode 2는 약 0.055 nA 의 값을 나타내었으며 정전용약은 0V 일 때 1 kHz 주파수 대역에서 약 19.5 pF, 200 kHz 주파수 대역에서 약 19.8 pF의 적은 정전용약을 나타내었다. 또한 출력신호의 상승시간은 10 V의 전압일 때 약 30 ns의 고속 응답특성을 확인하였다. 광학적 특성 분석으로는 880 nm에서 최대 0.66 A/W의 분광감응도 값을 나타내었고 1000 nm에서는 0.45 A/W로 비교적 우수한 분광감응도를 나타내었다.

In order to improve spectrum sensitivity of photodiode for detection of the laser at 850 nm ~ 1000 nm of near-infrared wavelength band, this study has produced silicon-based fast film PIN photodiode and analyzed electrical and optical properties. The manufactured device is packaged in TO-18 type. The electrical properties of the dark currents both Anode 1 and Anode 2 have valued of approximately 0.055 nA for 5 V reverse bias, while the capacitance showed 19.5 pF at frequency range of 1 kHz and about 19.8 pF at the range of 200 kHz for 0 V. In addition, the rising time of output signal was verified to have fast response time of about 30 ns for 10 V. For the optical properties, the best spectrum sensitivity was 0.66 A/W for 880 nm, while it was relatively excellent value of 0.45 A/W for 1,000 nm.

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참고문헌

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