Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Hybrid Automatic Focusing Method with Gaussian Interpolation and Adaptive Step Size

가우시안보간과 적응스텝크기를 적용한 하이브리드 오토포커싱

  • Moon, Soon Hwan (Dept. New Renewable Energy, Chungbuk Health & Science University) ;
  • Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
  • 문순환 (충북보건과학대 신재생에너지과) ;
  • 김경범 (한국교통대학교 항공기계설계학과)
  • Received : 2014.02.25
  • Accepted : 2014.03.20
  • Published : 2014.03.31
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Abstract

In this paper, an hybrid automatic focusing method has been proposed for speedy and reliable measurement and inspection in industry. It can improve reliability of focusing position by using not a focusing measure but the hybrid one that is incorporated with sobel operator and auto-correlation. Also, it can not only reduce control time of focusing position using adaptive step size, but also improve accuracy of focusing position by gaussian interpolation. Its performance is verified by experiments. It is expected that it can apply to optical system for measurement and inspection in industry fields.

Keywords

References

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