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A Hybrid Automatic Focusing Method with Gaussian Interpolation and Adaptive Step Size  

Moon, Soon Hwan (Dept. New Renewable Energy, Chungbuk Health & Science University)
Kim, Gyung Bum (Aeronautical & Mechanical Design Engineering, Korea National University of Transportation)
Publication Information
Journal of the Semiconductor & Display Technology / v.13, no.1, 2014 , pp. 51-55 More about this Journal
Abstract
In this paper, an hybrid automatic focusing method has been proposed for speedy and reliable measurement and inspection in industry. It can improve reliability of focusing position by using not a focusing measure but the hybrid one that is incorporated with sobel operator and auto-correlation. Also, it can not only reduce control time of focusing position using adaptive step size, but also improve accuracy of focusing position by gaussian interpolation. Its performance is verified by experiments. It is expected that it can apply to optical system for measurement and inspection in industry fields.
Keywords
Adaptive step size; Auto-correlation; Focus measure; Hybrid automatic focusing;
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