반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
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반도체 세정용 Spot Spray Type 메가소닉의 음압특성에 관한 연구

A Study on Acoustic Pressure Characteristics of Spot Spray Type Megasonic for Semiconductor Cleaning

  • 투고 : 2013.09.23
  • 심사 : 2014.02.28
  • 발행 : 2014.03.31
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초록

In this study, to analyze characteristics of acoustic pressure for spot spray type megasonic, FEM analysis was performed for variable parameters based on the structure of commercial one. and 2 models of transmitter were designed and fabricated, and then acoustic pressure distribution(APD) of the transmitter was measured and compared to the commercial. The results of this experiment show that maximum acoustic pressure of model 1 was higher to 1.6 times compared to the commercial, and model 2 was higher to 1.23 times. Through the course of this study, design technology of transmitter has been developed by means of FEM analysis and experiment for characteristics of acoustic pressure. Also, it is expected to be useful in the development of high power spray type megasonic that is necessary with advance in semiconductor technology.

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참고문헌

  1. Kim, H. S., Lee, Y. L., Lim, E. S., "Design and fabrication of an L-type waveguide megasonic system for cleaning on nano-scale patterns", Current Applied Physics 9, 189-192, 2009 https://doi.org/10.1016/j.cap.2008.01.009
  2. Hauptmann, M., Brems, S., Camerotto, E., Zijlstra, A., Doumen, G., Bearda, T., Mertens, P, W., Lauriks, W., "Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning", Microelectronic Engineering 87, 1512-1515, 2010 https://doi.org/10.1016/j.mee.2009.11.061
  3. Koo, J., Kim, T., Jung, C., Lee, J., Kim, T., "Effects of wafer and iso-propyl alcohol relative humidities on single wafer cleaning system performance", International Journal of heat and Mass Trasnfer 50, 4275-4285, 2007 https://doi.org/10.1016/j.ijheatmasstransfer.2007.02.043
  4. Zamani, D., Dhane, K., Mahdavi, O., McBride, M, A., Yan, J., "Surface cleaning of small structures during spin rinsing of patterned substrates", Microelectronic Engineering 108, 57-65, 2013 https://doi.org/10.1016/j.mee.2013.02.092
  5. Dale Ensminger, "ULTRASONICS, Fundamentals Technology Applications", MARCEL DEKKER, INC, 111-159, 1988
  6. HAMONIC, B. F., Wilson, O. B., Decarpigny, J.-N., "Power Transducers for Sonics and Ultrasonics", Springer-Verlag,35-47, 1990
  7. Zelenka J., "Piezoelectric Resonators and their Applications", ELSEVIER, 46-63, 1986
  8. Pollard, H. F., "Sound Waves in Solids", Pion Limited, 1-17, 1977
  9. Kinsler, L. E., Frey, A. R., Coppens, A. B., and Sanders, J. V., "Fundamentals of Acoustics-3rd ed.," John Wiley & Sons, pp. 7-20, 99-198, 1965.
  10. Peric, L., "Coupled Tensors of Piezoelectric Materials State," MPI, pp. 17-56. 2004.
  11. NYE, J. F., "Physical Properties of Crystals," Oxford Science Publications, pp. 131-147.1984
  12. Krautkramer, J., and Krautkramer, H., "Ultrasonic Testing of Materials-2nd ed.," Springer-Verlag. pp. 17-40, 62-85, 1977