조명전기설비학회논문지 (Journal of the Korean Institute of Illuminating and Electrical Installation Engineers)

  • 제28권3호
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  • Pages.57-62
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  • 2014
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  • 1229-4691(pISSN)
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  • 2287-5034(eISSN)
한국조명전기설비학회 (The Korean Institute of IIIuminating and Electrical Installation Engineers)
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산화 열처리법에 의해 제작된 산화 몰리브데늄 박막의 표면특성 고찰

Surface characteristics of Molybdenum Oxide Films Prepared by Oxidation Thermal Treatment Method

  • 투고 : 2014.01.15
  • 심사 : 2014.02.03
  • 발행 : 2014.03.31
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초록

In this work, molybdenum oxide films were fabricated by heat-treatment method. Fundamental surface characteristics of molybdenum oxide films were investigated using XRD and Raman spectroscopy. From the results, the optimum MoOx films could be obtained under the conditions of thermal treatment temperature of $550^{\circ}C$, oxidation time of 30 minutes and oxygen flow rate of 250sccm. The thermal treatment method offers a simple and effective route for the synthesis of uniform $MoO_3$ films.

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참고문헌

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