한국안전학회지 (Journal of the Korean Society of Safety)

  • 제29권6호
  • /
  • Pages.40-45
  • /
  • 2014
  • /
  • 1738-3803(pISSN)
  • /
  • 2383-9953(eISSN)
한국안전학회 (The Korean Society of Safety)
권호 표지
DOI QR코드

DOI QR Code

바 형태 정전기제거장치의 정전기제거성능 향상을 위한 연구 (2)

A Study on Improvement of the Performance of Pulsed AC Ion Bar (2)

  • 이동훈 (부경대학교 안전공학과) ;
  • 최동수 (부경대학교 대학원 안전공학과) ;
  • 김상민 (부경대학교 대학원 안전공학과) ;
  • 박진철 ((주)선재하이테크 기술연구소)
  • Lee, Dong Hoon (Department of Safety Engineering, Pukyong National University) ;
  • Choi, Dong Soo (Department of Safety Engineering, Graduate School, Pukyong National University) ;
  • Kim, Sang Min (Department of Safety Engineering, Graduate School, Pukyong National University) ;
  • Park, Jin Chul (R&D Center, SunJe Hi-Tek. Co., Ltd.)
  • 투고 : 2014.10.08
  • 심사 : 2014.11.11
  • 발행 : 2014.12.31
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초록

In display such as LCD, LED, and AMOLED or semiconductor related industries are required to have static ionizer in order to produce reliable goods. The most general type of ionization is called, "corona discharge" that has a slight chances to generate unequal and unstable amount of each +/- ion to the target object. Then, the ionization performance will drastically decrease and end up with quality deterioration problem. continually "A study on the improvement of the performance of pulsed AC ion bar(1)", we have studied consecutive study to improve the current issue via appling "partition wall" at air nozzle surrounding. The results were that the charge decay time and the ion balance was maintained the satisfied range that was within 5 second and ${\pm}50$ V for a 180 days period of time. In additions, the contamination status on the electrode surface was investigated for a 180 days. The little particles was deposited on the electrode surface.

키워드

참고문헌

  1. K. Murray and V. Gross, "Ozone and Small Particle Production by Steady State DC Hood Ionization", EOS/ESD Symposium Proceeding, 1989.
  2. J. Xianggang, K. Shigeo and T. Yuao, "Neutralization of the Charges Caused by ESD on Film Surfaces with AC Eliminator", T.IEE Japan, Vol.112-A, No.10, pp.855-860, 1992.
  3. J. E. Vinson and J. J. Liou, "Electrostatic Discharge in Semiconductor Devices", Proc. IEEE, Vol.86, No.2, pp.399-418, 1998. https://doi.org/10.1109/5.659493
  4. L. A. Avery, "A Review of Electrostatic Discharge Mechanisms ad On-chip Protection Techniques to Ensure Device Reliability", J. of Electrostatics, Vol. 24, Issue 2, pp.111-130, 1990. https://doi.org/10.1016/0304-3886(90)90003-E
  5. Y. Tabata, "Electrostatic Properties of Antistatic Cloth Woven Partly with Electrically Conductive Fibers", Industry Applications, IEEE Transactions on, Vol.24, Issue 2, pp. 245-249, 1988. https://doi.org/10.1109/28.2863
  6. W. D. Greason, "Electrostatic Discharge: A Charge Driven Phenomenon", In Proc, EOS/ESD Symp., Vol.EOS-13, pp. 1-9, 1991.
  7. D. H. Lee and D. S. Choi, "A Study on Improvement of the Performance of Pulsed AC Ion Bar (1)", Journal of the Korean Society of Safety, Vol. 29, No. 3, pp. 34-38, 2014. https://doi.org/10.14346/JKOSOS.2014.29.3.034