마이크로전자및패키징학회지 (Journal of the Microelectronics and Packaging Society)

  • 제21권4호
  • /
  • Pages.111-115
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  • 2014
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  • 1226-9360(pISSN)
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  • 2287-7525(eISSN)
한국마이크로전자및패키징학회 (The Korean Microelectronics and Packaging Society)
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동적인 전기장이 다마신 구리 배선에서의 절연파괴에 미치는 영향

Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects

  • 연한울 (서울대학교 재료공학부) ;
  • 송준영 (서울대학교 재료공학부) ;
  • 임승민 (서울대학교 재료공학부) ;
  • 배장용 (삼성전자 메모리사업부 개발QA팀) ;
  • 황유철 (삼성전자 메모리사업부 개발QA팀) ;
  • 주영창 (서울대학교 재료공학부)
  • Yeon, Han-Wool (Department of Materials Science and Engineering, Seoul National University) ;
  • Song, Jun-Young (Department of Materials Science and Engineering, Seoul National University) ;
  • Lim, Seung-Min (Department of Materials Science and Engineering, Seoul National University) ;
  • Bae, Jang-Yong (Department of Device Solutions, Samsung Electronics) ;
  • Hwang, Yuchul (Department of Device Solutions, Samsung Electronics) ;
  • Joo, Young-Chang (Department of Materials Science and Engineering, Seoul National University)
  • 투고 : 2014.11.30
  • 심사 : 2014.12.24
  • 발행 : 2014.12.30
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초록

다마신 구리 배선에서의 동적인 전기장에 따른 절연체 파괴거동을 연구하였다. DC, 단극성, 및 이극성 펄스 조건 중에서 절연체의 수명은 이극성 펄스 조건에서 가장 길었다. DC 및 단극성 펄스 조건에서는 절연체에 가해지는 전기장의 방향이 바뀌지 않지만 이극성 펄스 조건에서는 전기장의 방향이 반복적으로 180도 바뀌기 때문에, 이극성 펄스 조건에서는 절연체의 구리오염이 억제되고, 이로 인해서 절연체 수명이 이극성 펄스 조건에서 가장 긴 것으로 판단된다. 단극성 펄스 조건에서 펄스 주파수가 커질수록 DC 조건보다 절연체의 수명이 증가하였다. 이는 절연체 수명에 구리오염 뿐만 아니라 내재적인 절연파괴현상이 상당한 영향을 미치며, 절연체 분자결합파괴가 일어날 확률은 펄스 폭이 좁아질수록 감소한다고 판단된다.

Effect of dynamic electric fields on dielectric breakdown behavior in Cu damascene interconnects was investigated. Among the DC, unipolar, and bipolar pulse conditions, the longest dielectric lifetime is observed under the bipolar condition because backward Cu ion drift occurs when the direction of electric field is changed by 180 degrees and Cu contamination is prohibited as a results. Under the unipolar pulse condition, the dielectric lifetime increases as pulse frequency increases and it exceed the lifetime under DC condition. It suggests that the intrinsic breakdown of dielectrics significantly affect the dielectric breakdown in addition to Cu contamination. As the unipolar pulse width decreases, dielectric bond breakdown is more difficult to occur.

키워드

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