References
- Geschke, O., Klank, H. and Tellemann, P., 2004, Microsystem Engineering of Lab-on-a-Chip Devices, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, pp. 161-168.
- Zribi, A. and Fortin, J., 2003, Functional Thin Films and Nanostructures, Springer Science+Business Media, New York, pp. 70-72.
- Iliescu, C. Chen, B. and Miao, J., 2008, "On the Wet Etching of Pyrex Glass," Sens. Actuator A, Vol. 143, pp. 154-161. https://doi.org/10.1016/j.sna.2007.11.022
- Jeon, S. K., Shin, Y. J., Kim, B. H., Kim H. Y. and Jeon, B. H., 2003, "Micro-Machining of Glasses using Chemical-assisted Ultrasonic Machining," Trans. of the KSME (A), Vol. 27, No. 12, pp. 2085-2091. https://doi.org/10.3795/KSME-A.2003.27.12.2085
- Takeuchi, Y., Sawada, K. and Sata, T., 1996, "Ultraprecision 3D Micromachining of Glass," CIRP Annals, Vol. 45, No. 1, pp. 401-404. https://doi.org/10.1016/S0007-8506(07)63090-X
- Sayah, A., Thivolle, P. A., Pararshar, V. K. and Gijs, M. A. M., 2010, "Three-dimensional Mixers with non- Planar Microchannels in a Monolithic Glass Substrate using Oblique Powder Blasting," J. Micromech. Microeng, vol. 20, 085028. https://doi.org/10.1088/0960-1317/20/8/085028
- Jauregui, A. L., Siller, H. R., Rodrigues, C. A. and Elias-Zuniga, A., 2010, "Evaluation of Micromechanical Manufacturing Processes for Microfluidic Devices," Int J Adv Manuf Technol, Vol. 48, pp. 963-972. https://doi.org/10.1007/s00170-009-2326-y
- Shen, M, Walter, S., Dovat, L. and Gijs, M. A. M., 2011, "Planar Micro-Direct Methanol Fuel Cell Prototyped by Rapid Powder Blasting," Microelectronic Engineering, Vol. 88, pp. 1884-1886. https://doi.org/10.1016/j.mee.2010.12.079
- Kirby, B. J. and Hasselbrink, E. F., 2004, "Zeta Potential of Microfluidic Substrates: 1. Theory, Experimental Techniques, and Effects on Separation," Electrophoresis, Vol. 25, pp. 187-202. https://doi.org/10.1002/elps.200305754
- Ghobeity, A., Crabtree, H. J., Papini, M. and Spelt, J. K., 2012, "Characterisation and Comparison of Microfluidic Chips formed using Abrasive Jet Micromachining and Wet Etching," J. Micromech. Microeng., Vol. 22, 025014. https://doi.org/10.1088/0960-1317/22/2/025014
- Wensink, H., Schalautmann, S., Goedbloed, M. H. and Elwenspoek, M. C., 2002, "Fine Tuning the Roughness of Powder Blasted Surfaces," J. Micromech. Microeng., Vol. 12, pp. 616-620. https://doi.org/10.1088/0960-1317/12/5/316
- Mineta, T., Takada, T., Makino, E., Kawashima, T. and Shibata, T., 2009, "A Wet Abrasive Blasting Process for Smooth Micromachining of Glass by Ductile-Mode Removal," J. Micromech. Microeng., Vol. 19, 015031. https://doi.org/10.1088/0960-1317/19/1/015031
- Hutchings, I. M., 1992, "Ductile-Brittle Transitions and Wear Maps for the Erosion and Abrasion of Brittle Materials," J. Phys. D: Appl. Phys., Vol. 25, pp. 212-221. https://doi.org/10.1088/0022-3727/25/1A/033
- Wensink, H. and C.Elwenspoek, M., 2002, "A closer look at the Ductile-Brittle Transition in Solid particle Erosion," Wear, Vol. 253, pp. 1035-1043. https://doi.org/10.1016/S0043-1648(02)00223-5
- Wensink, H., Jansen, H. V., Berenschot, J. W. and Elwenspoek, M. C., 2001, "Mask Materials for Powder Blasting," J. Micromech. Microeng., Vol. 10, pp. 175-180.
- Slikkerveer, P. J., Bouten, P. C. P., Veld, F. H. and Scholten, H., 1998, "Erosion and Damage by Sharp Particles," Wear, Vol. 217, pp. 237-250. https://doi.org/10.1016/S0043-1648(98)00187-2