산업경영시스템학회지 (Journal of Korean Society of Industrial and Systems Engineering)

  • 제36권2호
  • /
  • Pages.1-7
  • /
  • 2013
  • /
  • 2005-0461(pISSN)
  • /
  • 2287-7975(eISSN)
한국산업경영시스템학회 (Society of Korea Industrial and System Engineering)
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장비 구동부품 기인 Particle 평가를 위한 마모측정기의 개발에 관한 연구

A Study of Developing Wear Tester to Measure and Minimize Particle Levels in Cleanroom

  • 박광희 (금오공과대학교 컨설팅대학원) ;
  • 노권학 ;
  • 장성호 (금오공과대학교 컨설팅대학원) ;
  • 이종환 (금오공과대학교 컨설팅대학원) ;
  • 차영철 (금오공과대학교 컨설팅대학원) ;
  • 전해등 (금오공과대학교 컨설팅대학원)
  • Park, Kwang Hee (Kumoh National Institute of Technology Graduate School of Consulting) ;
  • Noh, Kwonhak (LG Display) ;
  • Chang, Sung Ho (Kumoh National Institute of Technology Graduate School of Consulting) ;
  • Lee, Jonghwan (Kumoh National Institute of Technology Graduate School of Consulting) ;
  • Cha, Young Cheul (Kumoh National Institute of Technology Graduate School of Consulting) ;
  • Chun, Hae Dong (Kumoh National Institute of Technology Graduate School of Consulting)
  • 투고 : 2013.02.06
  • 심사 : 2013.05.01
  • 발행 : 2013.06.30
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초록

Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particles and bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies producing precision machines and electrical parts essentially have industrial cloom facilities and clean technologies to produce defects free products due to particles. Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of sub-micro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

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참고문헌

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