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Design of Ultrasonic Tool Horn for Wire Wedge Bonding

와이어 본딩용 초음파 공구혼 설계에 관한 연구

  • Lee, Bong-Gu (Division of Mechanical Engineering Technology, Yeungnam College of Science & Technology) ;
  • Oh, Myung-Seok (Division of Mechanical Engineering Technology, Yeungnam College of Science & Technology) ;
  • Ma, Jeong-Beom (School of Mechanical Engineering, Dongyang Mirae University)
  • Received : 2013.05.24
  • Accepted : 2013.07.25
  • Published : 2013.08.15

Abstract

In this study, we investigated the design of a wire wedge bonding ultrasonic tool horn using finite element method (FEM) simulations. The proposed method is based on an initial design estimate obtained by FEM analysis. An ultrasonic excitation causes various vibrations of a transducer horn and capillary. A simulated ultrasonic transducer horn and resonator are then built and characterized experimentally using a laser interferometer and electrical impedance analyzer. The vibration characteristics and resonance frequencies close to the exciting frequency are identified using ANSYS. FEM analysis is developed to predict the resonance frequency of the ultrasonic horn and use it in the optimal design of an ultrasonic horn mode shape.

Keywords

References

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