DOI QR코드

DOI QR Code

Friction Reduction Properties of Evaporation Coated Petroleum and Silicone Oil Lubricants

증발 코팅법으로 증착된 광유와 실리콘 오일 윤활제의 마찰 저감 특성

  • Received : 2013.05.16
  • Accepted : 2013.07.09
  • Published : 2013.08.01

Abstract

As the size of mechanical components decreases, capillary forces and surface tension become increasingly significant. A major problem in maintaining high reliability of these small components is that of large frictional forces due to capillary action and surface tension. Unlike the situation with macro-scale systems, liquid lubrication cannot be used to reduce friction of micro-scale components because of the excessive capillary and drag forces. In this work, the feasibility of using evaporation to coat a thin film of organic lubricant on a solid surface was investigated with the aim of reducing friction. Petroleum and silicone oils were used as lubricants to coat a silicon substrate. It was found that friction could be significantly reduced and, furthermore, that the effectiveness of this method was strongly dependent on the coating conditions.

Keywords

References

  1. Trimmer, W. S. N., "Microrobots and Micro mechanical Systems," Sensor. Actuator., Vol. 19, pp. 267-287, 1989. https://doi.org/10.1016/0250-6874(89)87079-9
  2. Carlo, M. and Metin, S., "A Biomimetic Climbing Robot Based on the Gecko," J. Bionic Eng., Vol. 3, No. 3, pp. 115-125, 2006. https://doi.org/10.1016/S1672-6529(06)60015-2
  3. Akiyama, T., Collard. D., and Fujita, H., "Scratch Drive Actuator with Mechanical Links for Selfassembly of Three-dimensional MEMS," J. Microelectromech. S., Vol. 6, No. 1, pp. 10-17, 1997. https://doi.org/10.1109/84.557525
  4. Kim, S. H., Asay, D. B., and Dugger, M. T., "Nanotribology and MEMS," Nano Today, Vol. 2, No. 5, pp. 22-29, 2007.
  5. Kim, H. J. and Kim, D. E., "Nano-scale Friction : a Review," Int. J. Precis. Eng. Manuf., Vol. 10, No. 2, pp. 141-151, 2009.
  6. Kim, H. J., Yoo, S. S., and Kim, D. E., "Nano-scale Wear : a Review," Int. J. Precis. Eng. Manuf., Vol. 13, No. 9, pp. 1709-1718, 2012. https://doi.org/10.1007/s12541-012-0224-y
  7. Yang, J. C. and Kim, D. E., "Tribological Characteristics of FDTS & OTS SAM according to Annealing Temperature," J. Korean Soc. Precis. Eng., Vol. 20, No. 1, pp. 240-247, 2003.
  8. Sung, I. H., Yang, J. C., Kim, D. E., and Shin, B. S., "Micro/nano-tribological Characteristics of Selfassembled Monolayer and Its Application in Nanostructure Fabrication," Wear, Vol. 255, No. 7-12, pp. 808-818, 2003. https://doi.org/10.1016/S0043-1648(03)00058-9
  9. Asy, D. B., Dugger, M. T., and Kim, S. H., "In-situ Vapor-Phase Lubrication of MEMS," Tribol. Lett., Vol. 29, No. 1, pp. 67-74, 2008. https://doi.org/10.1007/s11249-007-9283-0
  10. Ashurst, W. R., Carraro, C., and Maboudian, R., "Vapor Phase Anti-Stiction Coatings for MEMS," IEEE T. Device Mat. Re., Vol. 3, No. 4, pp. 173-178, 2003. https://doi.org/10.1109/TDMR.2003.821540

Cited by

  1. Frictional Characteristics of Silicon Surface with Micro-dimple Pattern vol.31, pp.5, 2014, https://doi.org/10.7736/KSPE.2014.31.5.451