전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제62권7호
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  • Pages.974-979
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  • 2013
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  • 1975-8359(pISSN)
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  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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R.F.스퍼터링법에 의해 제작된 TiO2 박막의 습도감지특성

Humidity Sensing Characteristics of TiO2 Thin Films Fabricated by R.F.Sputtering Method

  • You, Do-Hyun (Dept. of Electrical Engineering, Shin Ansan University)
  • 투고 : 2013.02.26
  • 심사 : 2013.06.05
  • 발행 : 2013.07.01
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초록

$TiO_2$ thin films are fabricated using R.F.sputtering method. $TiO_2$ thin films are coated on $Al_2O_3$ substrate printed IDE(interdigitated electrode). Impedance of thin films decreases according to increase relative humidity and it increases according to decrease measuring frequency. When substrate temperature is room temperature, impedance of thin films is from 45.68[MHz] to 37.76[MHz] within the limits from 30[%RH] to 75[%RH] at 1[kHz]. Whereas when substrate temperature is 100[$^{\circ}C$], impedance of thin films is from 692[kHz] to 539[kHz] within the limits from 30[%RH] to 75[%RH] at 1[kHz]. Impedance variation of thin films is bigger in low frequency regions than in high frequency regions. When substrate temperature is 100[$^{\circ}C$], impedance of thin films is lower than that of room temperature.

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참고문헌

  1. K.D.Schierbaum, "Engineering of Oxide Surfaces and Metal/Oxide Interfaces for Chemical Sensors : Recent Trends", Sensors and Actuators B, Vol.24, Issue 1-3, pp.239-247, 1995. https://doi.org/10.1016/0925-4005(95)85051-1
  2. M.Li and Y.Chen, "An Investigation of Response Time of $TiO_2$ Thin-Film Oxygen Sensors", Sensors and Actuators B, Vol.32, Issue 1, pp.83-85, 1996. https://doi.org/10.1016/0925-4005(96)80113-4
  3. J.Szczyrbowski, G.Brauer, G.Teschner and A.Zmelty, "Antireflective Coatings on Large Scale Substrates Produced by Reactive Twin-Magnetron Sputtering", Journal of Non Crystalline Solids, Vol.218, 2, pp.25-29, 1997. https://doi.org/10.1016/S0022-3093(97)00129-4
  4. H.Ohsaki, Y.Tachibana, A.Hayashi, A.Mitsui and Y.Hayashi, "High Rate Sputter Deposition of $TiO_2$ from $TiO_{2-x}$ Target", Thin Solid Films, Vol.351, Issue 1-2, pp.57-60, 1999. https://doi.org/10.1016/S0040-6090(99)00207-2
  5. D.Bhattacharyya, N.K.Sahoo, S.Thakur and N.C.Das, "Spectroscopic Ellipsometry of $TiO_2$ Layers Prepared by Ion-Assisted Electron-Beam Evaporation", Thin Solid Films, Vol.360, Issue 1-2, pp.96-102, 2000. https://doi.org/10.1016/S0040-6090(99)00966-9
  6. P.Zeman and S.Takabayashi, "Effect of Total and Oxygen Partial Pressures on Structure of Photocatalytic $TiO_2$ Films Sputtered on Unheated Substrate", Surface and Coatings Technology, Vol.153, Issue 1, pp.93-99, 2002. https://doi.org/10.1016/S0257-8972(01)01553-5
  7. -ノ瀨 昇, セラミツクセンサ利用技術總論, 學獻社, pp.106-107, 1989.
  8. J.H.Anderson Jr. and G.A.Parks, "Electrical Conductivity of Silica Gel in the Presence of Adsorbed Water", The Journal of Physical Chemistry, Vol.72, No.10, pp.3662-3668, 1968. https://doi.org/10.1021/j100856a051
  9. J.Oscik, Adsorption, Halsted Press, New York, pp.26-63, 1982.
  10. 鳳誠三郞 外, 誘電體現象論, pp.120-121, 1988.
  11. J.H.Choi, D.H.Shin, K.P.Jang, K.C.Namgung, J.K.Kim and W.J.Lee, "A Study on the Photocatalytic Properties of Sputtered $TiO_2$ Films", Journal of Korean Institute of Metals and Materials, Vol.36, No.9, pp.1477-1483, 1998.
  12. V.Vancoppenolle, P.Y.Jouan, M.Wautelet, J.P.Dauchot and M.Hecq, "D.C. Magnetron Sputtering Deposition of $TiO_2$ Films in Argon-Oxygen Gas Mixtures : Theory and Experiments", Surface and Coatings Technology, Vol. 116-119, pp.933-937, 1999. https://doi.org/10.1016/S0257-8972(99)00267-4
  13. Y.W.Cha, K.J.Lee and Y.H.Kim, "Effect of Sputter Parameters on Crystal Structure and Optical Properties of $TiO_2$/Ag Films", Korean Journal of Materials Research, Vol.6, No.1, pp.49-56, 1996.
  14. K.H.Ro, W.Park, G.Choe and J.C.Ahn, "The Microstructure and Optical Properties of $TiO_2$ Thin Film by R.F. Magnetron Reactive Sputtering", Korean Journal of Materials Research, Vol.7, No.1, pp.21-26, 1997.