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Numerical Study on the Discharge Characteristics of Cylindrical Discharge Devices

원통형 방전소자의 방전특성 연구

  • Seo, Jeong-Hyun (Dept. of electronics engineering, Incheon national university) ;
  • Shin, Bhum-Jae (Dept. of electronics engineering, Sejong university)
  • 서정현 (인천대학교 전자공학과) ;
  • 신범재 (세종대학교 전자공학과)
  • Received : 2013.02.21
  • Accepted : 2013.06.10
  • Published : 2013.07.01

Abstract

In this paper, the discharge characteristics of ac-type cylindrical discharge devices with diameters (D) in the $50{\sim}400{\mu}m$ range have been investigated numerically. The cylindrical devices have much lower breakdown voltages compared to the coplanar electrode structures. The breakdown voltage of the cylindrical structures increases with the decrease of diameters in $50{\sim}100{\mu}m$ range. In $100{\sim}200{\mu}m$ range, however, the breakdown voltage decreases slightly with the decrease of diameters. Also, as the diameter gets smaller, the electron heating efficiency is greatly improved.

Keywords

References

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