References
- Hirabayashi, A., "Fast Surface Profiling by White- Light Interferometry Using Symmetric Spectral Optical Filter," IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences, Vol. E93.A, No. 2, pp. 542-549, 2010. https://doi.org/10.1587/transfun.E93.A.542
- Hirabayashi, A., Ogawa, H., and Kitagawa, K., "Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory," Applied Optics, Vol. 41, No. 23, pp. 4876-4883, 2002. https://doi.org/10.1364/AO.41.004876
- Malacara, D., "Optical Shop Testing," John Wiley & Sons, pp. 711-743, 3rd Ed., 2007.
- Flounoy, P. A., McClure, R. W., and Wyntjes, G., "White-light interferometric thickness gauge," Applied Optics, Vol. 11, No. 9, pp. 1907-1915, 1972. https://doi.org/10.1364/AO.11.001907
- Balasubramanian, N., "Optical system for surface topography measurement," US Patent, No. 4340306, 1982.
- Cho, S. Y., "A study on fast Algorithm for White- Light interferometry to Semiconductor Inspection," M.Sc. Thesis, Department of Mechanical and Control Engineering, Sunmoon University, 2008.
- Ko, K. W., Ko, K. C., and Kim, J. H., "Pole Height Inspection on LCD Glass via High Speed White Light Interferometry," J. Korean Soc. Precis. Eng., Vol. 24, No. 4, pp. 21-28, 2007.
- Tian, A., Wang, C., Jiang, Z., Wang, H., and Liu, B., "Study on key algorithm for scanning white-light interferometry," Proc. of the SPIE, Vol. 7155, 2008.
- Cooley, J. W. and Tukey, J. W., "An algorithm for the machine calculation of complex Fourier series," Mathematics of Computation, Vol. 19, No. 90, pp. 297-301, 1965. https://doi.org/10.1090/S0025-5718-1965-0178586-1
- Recknagel, R. J. and Notni, G., "Analysis of white light interferograms using wavelet methods," Optics Communications, Vol. 148, No. 1-3, pp. 122-128, 1998. https://doi.org/10.1016/S0030-4018(97)00644-5
Cited by
- 3D Measurement System of Wire for Automatic Pull Test of Wire Bonding vol.21, pp.12, 2015, https://doi.org/10.5302/J.ICROS.2015.15.0131
- 3D Accuracy Enhancement of BGA Shiny Round Ball Using Optical Triangulation Method vol.32, pp.9, 2015, https://doi.org/10.7736/KSPE.2015.32.9.799