Journal of Korean Society for Atmospheric Environment (한국대기환경학회지)

Korean Society for Atmospheric Environment (한국대기환경학회)
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Experimental Study on Particle and Soluble Gas Removal Efficiency of Water-cyclone

Water-cyclone을 이용한 미세입자 및 수용성가스 제거효율에 대한 실험적 연구

  • Kim, Chun-Lee (Environment & Energy Convergence Tech. R&D, Pyeongtaek University) ;
  • Kwon, Sung-An (Environment & Energy Convergence Tech. R&D, Pyeongtaek University) ;
  • Lee, Sang-Jun (Environment & Energy Convergence Tech. R&D, Pyeongtaek University) ;
  • Ko, Chang-Bog (Korea Institue of Energy Research)
  • 김춘이 (평택대학교 환경에너지기술융합연구센터) ;
  • 권성안 (평택대학교 환경에너지기술융합연구센터) ;
  • 이상준 (평택대학교 환경에너지기술융합연구센터) ;
  • 고창복 (한국에너지기술연구원)
  • Received : 2012.12.19
  • Accepted : 2013.02.25
  • Published : 2013.04.30
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Abstract

The fine-particles, moisture and variety of hazardous gases are produced during electronic manufacture process. Most of the fine-particles are 0.1~10 ${\mu}m$ in size and the hazardous gases such as HF, $SiH_4$, CO, $NH_3$, etc. seriously affect environment, human's body and manufacturing process. To remove these characterized gases and fine-particles, Water-Cyclone designed and tested for removal efficiency on fine-particles and $NH_3$ under -980Pa negative pressure condition. As a result, under 0.1~1.0 $m^3/min$ flow condition, the efficiency on 5 ${\mu}m$ particles was 80~96%, 10 ${\mu}m$ particles was 86~96%, and 20 ${\mu}m$ particles was 91~99%. Besides, the removal efficiency on soluble gas $NH_3$ was 56.5% at 0.5m3/min and 79.1% at 1.0m3/min under 500 ppm flow concentration and 70.0% at 1.0 $m^3/min$ under 1,000 ppm flow concentration. Therefore, on particles, as the flow rate and particle size increased, the collection efficiency rate was increased. On soluble gas, as the flow rate increased, the removal efficiency was increased under the same concentration.

Keywords

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