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Characterization of Combined Micro- and Nano-structure Silicon Solar Cells using a POCl3 Doping Process

  • Jeong, Chaehwan (Energy and Applied Optics Research Group, Korea Institute of Industrial Technology) ;
  • Kim, Changheon (Energy and Applied Optics Research Group, Korea Institute of Industrial Technology) ;
  • Lee, Jonghwan (Energy and Applied Optics Research Group, Korea Institute of Industrial Technology) ;
  • Yi, Junsin (Department of Electronic Electronical Engineering, Sungkyunkwan University) ;
  • Lim, Sangwoo (Department of Chemical and Biomolecular Engineering, Yonsei University) ;
  • Lee, Suk-Ho (Research and business development team, Southwestern Research Institute of Green Energy Technology)
  • Received : 2013.04.08
  • Accepted : 2013.04.18
  • Published : 2013.06.30

Abstract

Combined nano- and micro-wires (CNMWs) Si arrays were prepared using PR patterning and silver-assisted electroless etching. A $POCl_3$ doping process was applied to the fabrication of CNMWs solar cells. KOH solution was used to remove bundles in CNMWs and the etching time was varied from 30 to 240 s. The lowest reflectance of 3.83% was obtained at KOH etching time of 30 s, but the highest carrier lifetime of $354{\mu}s$ was observed after the doping process at 60 s. At the same etching time, a $V_{oc}$ of 574 mV, $J_{sc}$ of $28.41mA/cm^2$, FF of 74.4%, and Eff. of 12.2% were achieved in the CNMWs solar cell. CNMWs solar cells have potential for higher efficiency by improving the post-process and surface-rear side structure.

Keywords

Acknowledgement

Supported by : Korea Institute of Energy Technology Evaluation and Planning (KETEP)