Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Effect of Solder Structure on the In-situ Intermetallic Compounds growth Characteristics of Cu/Sn-3.5Ag Microbump

Cu/Sn-3.5Ag 미세범프 구조에 따른 실시간 금속간화합물 성장거동 분석

  • Lee, Byeong-Rok (School of Materials Science and Engineering, Andong National University) ;
  • Park, Jong-Myeong (NEPES Corporation) ;
  • Ko, Young-Ki (Micro-Joining Center, Korea Institute of Industrial Technology) ;
  • Lee, Chang-Woo (Micro-Joining Center, Korea Institute of Industrial Technology) ;
  • Park, Young-Bae (School of Materials Science and Engineering, Andong National University)
  • 이병록 (안동대학교 신소재공학부 청정에너지 소재기술 연구센터) ;
  • 박종명 (Nepes Corporation, R&D센터) ;
  • 고영기 (한국생산기술연구원 용접접합기술센터) ;
  • 이창우 (한국생산기술연구원 용접접합기술센터) ;
  • 박영배 (안동대학교 신소재공학부 청정에너지 소재기술 연구센터)
  • Received : 2013.09.09
  • Accepted : 2013.09.26
  • Published : 2013.09.30
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Abstract

Thermal annealing tests were performed in an in-situ scanning electron microscope chamber at $130^{\circ}C$, $150^{\circ}C$, and $170^{\circ}C$ in order to investigate the effects of solder structure on the growth kinetics of intermetallic compound (IMC) in Cu/Sn-3.5Ag microbump. Cu/Sn-3.5Ag($6{\mu}m$) microbump with spreading solder structure showed $Cu_6Sn_5$ and $Cu_3Sn$ phase growths and then IMC phase transition stages with increasing annealing time. By the way, Cu/Sn-3.5Ag($4{\mu}m$) microbump without solder spreading, remaining solder was transformed to $Cu_6Sn_5$ right after bonding and had only a phase transition of $Cu_6Sn_5$ to $Cu_3Sn$ during annealing. Measured activation energies for the growth of the $Cu_3Sn$ phase during the annealing were 0.80 and 0.71eV for Cu/Sn-3.5Ag($6{\mu}m$) and Cu/Sn-3.5Ag($4{\mu}m$), respectively.

3차원 적층 패키지를 위한 Cu/Sn-3.5Ag 미세범프의 솔더 구조에 따른 금속간화합물 성장거동을 분석하기 위해 솔더 두께가 각각 $6{\mu}m$, $4{\mu}m$인 서로 다른 구조의 미세범프를 $130^{\circ}C$, $150^{\circ}C$, $170^{\circ}C$ 조건에서 실시간 주사전자현미경을 이용하여 실시간 금속간화합물 성장 거동을 분석하였다. Cu/Sn-3.5Ag($6{\mu}m$) 미세범프의 경우, 많은 양의 솔더로 인해 접합 직후 솔더가 넓게 퍼진 형상을 나타내었고, 열처리 시간경과에 따라 $Cu_6Sn_5$ 및 $Cu_3Sn$금속간화합물이 성장한 후, 잔류 Sn 소모 시점 이후 $Cu_6Sn_5$가 $Cu_3Sn$으로 상전이 되는 구간이 존재하였다. 반면, Cu/Sn-3.5Ag($4{\mu}m$) 미세범프의 경우, 적은양의 솔더로 인해 접합 직후 솔더의 퍼짐 현상이 억제 되었고, 접합 직후 잔류 Sn상이 존재하지 않아서 금속간화합물 성장구간이 억제되고, 열처리 시간경과에 따라 $Cu_6Sn_5$가 $Cu_3Sn$으로 상전이 되는 구간만 존재하였다. 두 시편의 $Cu_3Sn$상의 활성화 에너지의 값은 Cu/Sn-3.5Ag($6{\mu}m$) 및 Cu/Sn-3.5Ag($4{\mu}m$) 미세범프가 각각 0.80eV, 0.71eV로 나타났고, 이러한 차이는 반응기구 구간의 차이에 따른 것으로 판단된다. 따라서, 솔더의 측면 퍼짐 보다는 접합 두께가 미세범프의 금속간화합물 반응 기구를 지배하는 것으로 판단된다.

Keywords

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