원자층 박막 증착법을 이용한 나노 소자 공정 및 물성 연구

  • 남태욱 (연세대학교 전기전자공학부) ;
  • 김형준 (연세대학교 전기전자공학부)
  • Published : 2013.10.31

Abstract

Keywords

References

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