Polymer Science and Technology (한국고분자학회지:고분자과학과기술)
- Volume 24 Issue 5
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- Pages.517-527
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- 2013
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- 1225-0260(pISSN)
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- 2586-1476(eISSN)
Large-Area, Three-Dimensional Nanopatterning with Conformal Phase Masks
콘포말 위상 마스크를 이용한 대면적 3차원 나노패터닝
- Park, Junyong (Department of Materials Science and Engineering, KAIST Institute for the Nanocentury, Graphene Research Center, KAIST) ;
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Jeon, Seokwoo
(Department of Materials Science and Engineering, KAIST Institute for the Nanocentury, Graphene Research Center, KAIST)
- Published : 2013.10.25
Abstract
Keywords