참고문헌
- Kalisky, Y. and Kalisky, O., 2011, "Applications and Performance of High Power Lasers and in the Battlefield," Optical Materials, Vol. 34, pp. 457-460. https://doi.org/10.1016/j.optmat.2011.04.005
- Lee, H. H., Gwak, M. C., Choi, J. H. and Yoh, J. I., 2008, "High Power Laser Driven Shock Compression of Metals and Its Innovative Applications," Trans. of the KSME (B), Vol. 32, No. 11, pp. 832-840. https://doi.org/10.3795/KSME-B.2008.32.11.832
- Wang, X., Shen, Z. H., Lu, J. and Ni, X. W., 2010, "Laser-induced Damage Threshold of Silicon in Millisecond, Nanosecond, and Picosecond Regimes," Journal of the Applied Physics, Vol. 108, pp. 033103. https://doi.org/10.1063/1.3466996
- Rogalski, A., 2010, Infrared Detectors, 2nd edition, CRC Press, Boca Raton.
- Arora, V. K. and Dawar, A. L., 1996, "Laser-induced Damage Studies in Silicon and Silicon-based Photodetectors," Applied Optics, Vol. 35, No. 36, pp. 7061-7065. https://doi.org/10.1364/AO.35.007061
- Wang, X., Qin, Y., Wang, B., Zhang, L., Shen, Z., Lu, J. and Ni, X., 2011, "Numerical and Experimental Study of the Thermal Stress of Silicon Induced by a Millisecond Laser," Applied Optics, Vol. 50, No. 21, pp. 3725-3732. https://doi.org/10.1364/AO.50.003725
- Gross, T. S., Hening, S. D. and Watt, D. W., 1991, "Crack Formation During Laser Cutting of Silicon," Journal of Applied Physics, Vol. 69, No. 2, pp. 983-989. https://doi.org/10.1063/1.347291
- Li, D. H., Zheng, X. J., Wu, B. and Zhou, Y. C., 2009, "Fracture Analysis of a Surface Through-Thickness Crack in PZT Thin Film under a Continuous Laser Irradiation," Engineering Fracture Mechanics, Vol. 76, pp. 525-532. https://doi.org/10.1016/j.engfracmech.2008.11.009
- Murr, L. E. and Szilva, W. A., 1975, "Laser-Induced Fracture in Silicon," Journal of Materials Science, Vol. 10, pp. 1536-1548. https://doi.org/10.1007/BF01031854
- Conde, J. C., Martín, E., Gontad, F., Chiussi, S., Fornarini, L. and León, B., 2010, "Numerical Analysis of Temperature Profile and Thermal-Stress During Excimer Laser Induced Heteroepitaxial Growth of Patterned Amorphous Silicon and Germanium Bilayers Deposited on Si(100)," Thin Solid Films, Vol. 518, pp. 2431-2436. https://doi.org/10.1016/j.tsf.2009.09.135
- Zorba, V., Boukos, N., Zergioti, I. and Fotakis, C., 2008, "Ultraviolet Femtosecond, Picosecond and Nanosecond Laser Microstructuring of Silicon: Structural and Optical Properties," Applied Optics, Vol. 47, No. 11, pp. 1846-1850. https://doi.org/10.1364/AO.47.001846
- Karnakis, D. M., 2006, "High Power Single-shot Laser Ablation of Silicon with Nanosecond 355 nm," Applied Surface Science, Vol. 252, pp. 7823-7825. https://doi.org/10.1016/j.apsusc.2005.09.040
- Said-Bacar, Z., Leroy, Y., Antoni, F., Slaoui, A. and Fogarassy, E., 2011, "Modeling of CW Laser Diode Irradiation of Amorphous Silicon Films," Applied Surface Science, Vol. 257, pp. 5127-5131. https://doi.org/10.1016/j.apsusc.2010.11.025
- Yan, J., Sakai, S., Isogai, H. and Izunome, K., 2009, "Recovery of Microstructure and Surface Topography of Grinding-Damaged Silicon Wafers by Nanosecond- Pulsed Laser Irradiation," Semiconductor Science and Technology, Vol. 24, pp. 105018. https://doi.org/10.1088/0268-1242/24/10/105018
- Fu, Z., Wu, B., Gao, Y., Zhou, Y. and Yu, C., 2010, "Experimental Study of Infrared Nanosecond Laser Ablation of Silicon: The Multi-pulse Enhancement Effect," Applied Surface Science, Vol. 256, pp. 2092-2096. https://doi.org/10.1016/j.apsusc.2009.09.053
- Jellison, G. E. and Lowndes, D. H., 1982, "Optical Absorption Coefficient of Silicon at 1.152 at Elevated Temperatures," Applied Physics Letters, Vol. 41, pp. 594-596. https://doi.org/10.1063/1.93621
- Fu, C. J. and Zhang, Z. M., 2006, "Nanoscale Radiation Heat Transfer for Silicon at Different Doping Levels," Journal of Heat and Mass Transfer, Vol. 49, pp. 1703-1718. https://doi.org/10.1016/j.ijheatmasstransfer.2005.09.037
- Bass, M., Decusatis, C., Enoch, J., Lakshminarayanan, V., Li, G., Macdonald, C., Mahajan, V. and Stryland, E. V., 2011, Handbook of Optics, 3rd Edition Volume IV, McGraw-Hill, New York.
- Hull, R., 1999, Properties of Crystalline Silicon, INSPEC, London.
- Ravindra, N. M., Sopori, B., Gokce, O. H., Cheng, S. X., Shenoy, A., Jin, L., Abedrabbo, S., Chen, W. and Zhang, Y., 2001, "Emissivity Measurements and Modeling of Silicon-Related Materials: An Overview," Journal of Thermophysics, Vol. 22, No. 5, pp. 1593-1611. https://doi.org/10.1023/A:1012869710173
- Kim, K. W., Lee, J. H., Suh, J. and Cho, H. Y., 2007, "Finite Element Analysis for Prediction of Band Shape of Nd:YAG Laser Fillet Welding," Trans. of the KSME (A), Vol. 31, No. 8, pp. 839-846.
- Cook, R. F., 2006, "Strength and Sharp Contact Fracture of Silicon," Journal of Material Science, Vol. 41, pp. 841-872. https://doi.org/10.1007/s10853-006-6567-y
- eong, S. M., Park, S. E., Oh, H. S. and Lee, H. L., 2004, "Evaluation of Damage on Silicon Wafers using the Angle Lapping Method and a Biaxial Fracture Strength Test," Journal of Ceramic Processing Research, Vol. 5, No. 5, pp. 171-174.
- Choi, S. H., Kim, C. S., Jhang, K. Y. and Shin, W. S., 2011, "Influence of Surface Roughness on Morphology of Aluminum Alloy After Pulsed-Laser Irradiation," Trans. of the KSME (A), Vol. 35, No. 9, pp. 1105-1111. https://doi.org/10.3795/KSME-A.2011.35.9.1105
피인용 문헌
- High-Power Continuous-Wave Laser-Induced Damage to Complementary Metal-Oxide Semiconductor Image Sensor vol.39, pp.1, 2015, https://doi.org/10.3795/KSME-A.2015.39.1.105