한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제21권4호
  • /
  • Pages.563-569
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  • 2012
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
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비접촉식 그리퍼 적용을 위한 공기압 파지식 헤드 내부 관통로 고찰

Study on Through Paths Inside the Air Pressure Pick-Up Head for Non-Contact Gripper

  • 김준현 (서울과학기술대학교 기계자동차공학과)
  • 투고 : 2012.01.16
  • 심사 : 2012.04.30
  • 발행 : 2012.08.15
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초록

In the semiconductor and display device production processes, the handling of sensitive objects needs new carrying technology. Floating carrying motion is a practical alternative solution for non-contact handling of parts and substrates. This paper presents a study of through paths inside the air pressure pick-up head to generate the floating motion. The air motion by conceptual designed paths inside the head gradually develops positive pressure and vacuum between narrow objects. Positive pressure occurs through the head tip before discharging outside of the head. Negative pressure is developed by evacuating the inside head bottom as result of the radial flow connecting the vertical through-holes. The numerical analysis was done to figure out the stable levitation caused by the two acting forces between surfaces. In comparing with the standard case that the levitation gap gets 0.7-0.9 mm, it confirms the suggested head characteristics to show floating capacity in accordance with the head size, number of through-hole, and locations of through-hole in succession of conceptual design for a prototype.

키워드

참고문헌

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피인용 문헌

  1. 박판 웨이퍼의 적재 시 손상 최소화 기술 vol.22, pp.1, 2012, https://doi.org/10.5762/kais.2021.22.1.321