Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
권호 표지

Development of Stopper Mechanism for the Precision Stage with Nanometer Accuracy

초정밀 스테이지용 스토퍼기구의 개발

  • 권현규 (금오대학교 기전공학과) ;
  • 박창용 (금오공과대학교 기전공학과)
  • Published : 2012.04.30
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Abstract

This paper presents a new stopper mechanism for precision stage by using the Piezoelectric element actuator. The new stage including a new stopper mechanism has the precision positioning mechanism that was been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulataneouly. The stage is composed not of the mechanical two stopper but of only one Piezoelectric element actuator. The characteristics for the new stage and the stopper have been evaluated experimentally. As the results, we can know that the linearity error characteristics of stage is 30nm in the $20{\mu}m$ measurement range. In addition, the experimental results are confirmed the possibility of the movement in millimeter range.

Keywords

References

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