산업공학 (IE interfaces)

  • 제25권1호
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  • Pages.127-133
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  • 2012
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  • 1225-0996(pISSN)
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  • 2234-6465(eISSN)
대한산업공학회 (Korean Institute of Industrial Engineers)
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클러스터 툴의 예방유지보수 스케줄링 모형

A Preventive Maintenance Scheduling Model of the Cluster Tool

  • 이현 (한양대학교 산업경영공학과) ;
  • 박유진 (중앙대학교 경영학부) ;
  • 허선 (한양대학교 산업경영공학과)
  • Lee, Hyun (Department of Industrial and Management Engineering, Hanyang University) ;
  • Park, You-Jin (School of Business Administration, Chung-Ang University) ;
  • Hur, Sun (Department of Industrial and Management Engineering, Hanyang University)
  • 투고 : 2011.09.19
  • 심사 : 2011.10.21
  • 발행 : 2012.03.01
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초록

This paper considers the preventive maintenance scheduling problem of the cluster tool which is one of the most important manufacturing equipments in the next-generation semiconductor production environment. We define a random process that expresses the successive amount of chemicals accumulating inside the tool. Based on the renewal theory, we find the expected value and probability distribution of the time that the amount of accumulated chemicals exceeds a predetermined level. For a given probability that the accumulated chemicals exceeds the predetermined level we present a method to obtain the number of chamber operations to perform the preventive maintenance of that chamber. In addition, a method to get the preventive maintenance schedule for the whole cluster tool is presented. A numerical example is provided to illustrate our method.

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참고문헌

  1. Aized, T. (2010), Modelling and Analysis of Multiple Cluster Tools System with Random Failures Using Colored Petri Net, The International Journal of Advanced Manufacturing Technology, 50, 897-906. https://doi.org/10.1007/s00170-010-2592-8
  2. Draina, J. (2006), ISMI 300 Prime/450mm Industry Briefing, SEMICON Japan 2006.
  3. Dummler, M. (2004), Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing, Ph.D. Dissertation, University of Wuerzburg.
  4. Heyman, D. P. and Sobel, M. J. (1982), Stochastic Models in Operations Research, McGraw-Hill, New York.
  5. Jose, A. R.-H., Crabtree, J., Yao, X., Fernandez, E., Fu, M. C., Janakiram, M., Marcus, S. I., O'Connor, M., and Patel, N. (2010), Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing Systems: Software Tool and Simulation Case Studies, IEEE Transaction on Semiconductor Manufacturing, 23(3), 477-489. https://doi.org/10.1109/TSM.2010.2051731
  6. Lee, H. and Lee, T. (2006), Scheduling Single-armed Cluster Tools with Re-entrant Wafer Flows, IEEE Transaction on Semiconductor Manufacturing, 19(2), 226-240. https://doi.org/10.1109/TSM.2006.873402
  7. Lee, T. (2008), A Review of Scheduling Theory and Methods for Semiconductor Manufacturing Cluster Tools, In Proceedings of the 2008 Winter Simulation Conference, 2127-2135.
  8. Yao, X., Fernandez, E., Fu, M. C., and Marcus, S. I. (2004), Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing, IEEE Transaction on Semiconductor Manufacturing, 17(3), 345-356. https://doi.org/10.1109/TSM.2004.831948
  9. Yao, X., Xie, X., Fu, M. C., and Marcus, S. I. (2005), Optimal Joint Preventive Maintenance and Production Policies, Naval Research Logistics, 52, 668-681. https://doi.org/10.1002/nav.20107

피인용 문헌

  1. A branch and bound algorithm to minimize total tardiness of jobs in a two identical-parallel-machine scheduling problem with a machine availability constraint vol.66, pp.9, 2015, https://doi.org/10.1057/jors.2014.122
  2. Research Trends of Scheduling Techniques for Domestic Major Industries vol.41, pp.1, 2018, https://doi.org/10.11627/jkise.2018.41.1.059