전기학회논문지 (The Transactions of The Korean Institute of Electrical Engineers)

  • 제61권4호
  • /
  • Pages.585-589
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  • 2012
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  • 1975-8359(pISSN)
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  • 2287-4364(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지
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EA hot filament CVD system을 이용하여 금형공구강에 증착한 Ti(B,N)박막의 합성과 특성에 관하여

The Characteristic and Formation of Ti(B,N) Films on Steel by EA Hot Filament CVD

  • 윤중현 (단국대 공대 신소재공학과) ;
  • 최용 (단국대 공대 신소재공학과) ;
  • 최진일 (단국대 공대 신소재공학과)
  • 투고 : 2011.12.26
  • 심사 : 2012.03.13
  • 발행 : 2012.04.01
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초록

The characteristics of interface layer and the effect of mole fraction of inlet gas mixture($B_2H_6/H_2/N_2/TiCl_4$) on the microstructure of Ti(B,N) films were studied by microwave plasma hot filament CVD process. Ti(B,N) films were deposited on a substrate(STD-61) to develop a high performance of resistance wear coating tool. Ti(B,N) films were obtained at a gas pressure of 1 torr, bias voltage of 300 V and substrate temperature of $480^{\circ}C$ in $B_2H_6/H_2/N_2/TiCl_4$gas system. It was found that TiN, $TiB_2$, TiB and hexagonal boron nitride(h-BN) phases exist in thin layer on the STD-61.

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