Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Synthesis of Vertically Aligned Single-Walled Carbon Nanotubes by Thermal Chemical Vapor Deposition

열 화학기상증착법을 이용한 수직 정렬된 단일벽 탄소나노튜브의 합성

  • Jang, Sung-Won (BK21 Physics Research Division and Department of Energy Science, Sungkyunkwan University) ;
  • Song, Woo-Seok (BK21 Physics Research Division and Department of Energy Science, Sungkyunkwan University) ;
  • Kim, Yoo-Seok (BK21 Physics Research Division and Department of Energy Science, Sungkyunkwan University) ;
  • Kim, Sung-Hwan (BK21 Physics Research Division and Department of Energy Science, Sungkyunkwan University) ;
  • Park, Sang-Eun (BK21 Physics Research Division and Department of Energy Science, Sungkyunkwan University) ;
  • Park, Chong-Yun (BK21 Physics Research Division and Department of Energy Science, Sungkyunkwan University)
  • 장성원 (성균관대학교 BK21 물리연구단, 에너지과학과) ;
  • 송우석 (성균관대학교 BK21 물리연구단, 에너지과학과) ;
  • 김유석 (성균관대학교 BK21 물리연구단, 에너지과학과) ;
  • 김성환 (성균관대학교 BK21 물리연구단, 에너지과학과) ;
  • 박상은 (성균관대학교 BK21 물리연구단, 에너지과학과) ;
  • 박종윤 (성균관대학교 BK21 물리연구단, 에너지과학과)
  • Received : 2012.01.26
  • Accepted : 2012.02.29
  • Published : 2012.03.30
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Abstract

Carbon nanotubes have emerged as a promising material for multifaceted applications, such as composited nanofiber, field effect transistors, field emitters, gas sensors due to their extraordinary electrical and physical properties. In particular, synthesis of vertically aligned carbon nanotubes with a high aspect ratio has recently attracted attention for many applications. However, mass production of high-quality single-walled carbon nanotubes is still remain elusive. In this study, an effect of chemical vapor deposition conditions, including catalyst thickness, feedstock flow rate, and growth temperature, on synthesis of carbon nanotube was systematically investigated.

탄소나노튜브는 1차원의 구조에 기인하는 우수한 물리적, 전기적 특성으로 인해 다양한 분야에 응용 가능한 물질로 각광받고 있다. 특히, 수직 정렬된 단일벽 탄소나노튜브의 합성은 향상된 특성들을 기대할 수 있으며 다양한 분야로 활용가능하다. 본 연구에서는 열 화학기상증착법을 이용하여 합성과정에서 촉매층의 두께, 아세틸렌 가스의 주입량, 합성온도의 변화가 탄소나 노튜브의 길이와 직경에 미치는 영향을 조사하였다. 또한 위와 같은 조건에서의 촉매의 구조변화에 초점을 두어 이러한 현상을 이해하고자 하였다. 이러한 결과를 바탕으로 합성조건을 최적화하여 수백 ${\mu}m$ 길이의 결정성이 우수한 수직 정렬된 단일벽 탄소나노튜브를 합성하였다.

Keywords

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