Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Fabrication and Optical Characterization of Porous Silicon Nanowires

다공성 실리콘 나노선의 제작 및 광학적 특성 분석

  • 김정길 (경희대학교 대학원 물리학과) ;
  • 최석호 (경희대학교 응용과학대학 응용물리학과)
  • Received : 2012.11.02
  • Accepted : 2012.11.15
  • Published : 2012.12.15
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Abstract

Silicon nanowires (SiNWs) were fabricated by a metal-assisted chemical etching of Si and the porous structure on their surfaces was controlled by changing the volume ratio of the etching solution composed of hydrofluoric acid, hydrogen peroxide, and deionized water. The concentration of hydrogen peroxide as the oxidant was varied for controlling the porosity of SiNWs. The optical properties of porous SiNWs were unique and very different from those of single-crystalline Si, as characterized by measuring their photoluminescence and Raman spectra for different porosities.

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References

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