한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제25권2호
  • /
  • Pages.105-109
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  • 2012
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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두께와 직경 비에 따른 두께진동모드 압전소자의 공진 변위 궤적

Trajectory of Resonant Displacement of Thickness Vibration Mode Piezoelectric Devices According to Diameter/Thickness Ratio

  • Jeong, Yeong-Ho (Department of Electrical Engineering, Chungju National University)
  • 투고 : 2012.01.11
  • 심사 : 2012.01.20
  • 발행 : 2012.02.01
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초록

In this study, thickness vibration mode piezoelectric devices for AE sensor application were simulated using ATILA FEM program, and then fabricated. Trajectory resonant displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electro mechanical coupling factor was obtained when the ratio of diameter/thickness($\Phi/T$) was 0.75. The piezoelectric device of $\Phi/T$=0.75 exhibited the optimum values of fr= 183 kHz, displacement= $4.44{\times}10^{-7}[m]$, $k_{33}$= 0.69, which were suitable for the application of AE sensor piezoelectric device.

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참고문헌

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