Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of Hydrogen Sensors Using Graphenes Decorated Nanoparticles and Their Characteristics

나노입자가 코팅된 그래핀 기반 수소센서의 제작과 그 특성

  • Received : 2012.08.10
  • Accepted : 2012.10.15
  • Published : 2012.11.30
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Abstract

This paper presents the fabrication and characterization of graphene based hydrogen sensors. Graphene was synthesized by annealing process of Ni/3C-SiC thin films. Graphene was transferred onto oxidized Si substrates for fabrication of chemiresistive type hydrogen sensors. Au electrode on the graphene shows ohmic contact and the resistance is changed with hydrogen concentration. Nanoparticle catalysts of Pd and Pt were decorated. Response factor and response (recovery) time of hydrogen sensors based on the graphene are improved with catalysts. The response factors of pure graphene, Pt and Pd doped graphenes are 0.28, 0.6 and 1.26, respectively, at 50 ppm hydrogen concentration.

Keywords

Acknowledgement

Supported by : 한국연구재단

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