한국기계기술학회지 (Journal of the Korean Society of Mechanical Technology)

  • 제13권4호
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  • Pages.93-99
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  • 2011
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  • 1229-604X(pISSN)
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  • 2508-3805(eISSN)
한국기계기술학회 (Korean Society of Mechanical Technology)
권호 표지

광섬유를 이용한 미세 광 기계식 가속도 센서의 개발

Development of Micro-opto-mechanical Accelerometer using Optical fiber

  • 이승재 (원광대학교 기계자동차공학부)
  • 투고 : 2011.11.13
  • 심사 : 2011.12.21
  • 발행 : 2011.12.31
⟨ 이전 논문 다음 논문 ⟩

초록

This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

키워드

과제정보

연구 과제 주관 기관 : 원광대학교

참고문헌

  1. G. Byrne, D. Dornfeld, I. Inasaki, G. Ketteler, W. Konig, R. Teti, "Tool condition monitoring (TCM)-The status of research and industrial application", Annals of the CIRP Vol.44, pp. 541-567, 1995. https://doi.org/10.1016/S0007-8506(07)60503-4
  2. Jerzy W. Kalenik, Ryszard Pajak, "A cantilever opticalfiber accelerometer", Sensors and Actuators A 68, pp.350-355, 1998. https://doi.org/10.1016/S0924-4247(98)00066-1
  3. J. Marty, A. Malki, C.Renouf, P. Lecoy and F. Baillieu, Fiber-optic accelerometer using silicon micromachining techniques, Sensors and Actuators A 46-47, pp.470-473, 1995.
  4. G. Schröpfer, M. De Labachelerie, S. Ballandras, W. Elflein and H. Porte, "Lateral optical accelerometer micro -machined in (100) silicon with remote readout based on coherence modulation", Sensors and Actuators A 68, pp.344-349, 1998. https://doi.org/10.1016/S0924-4247(98)00065-X
  5. R. P. van Kampen, R. F. Wolffenbuttel, "Modeling the mechanical behavior of bulk-micromachined silicon accelerometers", Sensors and Actuators A 64, pp.137-150, 1998. https://doi.org/10.1016/S0924-4247(98)80007-1
  6. K. Ikuta, K. Hirowatari, "Real three dimensional micro fabrication using stereolithography and metal molding", Proc. Of Mechanical system (MEMS93), pp.42-47, 1993.