열처리공학회지 (Journal of the Korean Society for Heat Treatment)

  • 제24권3호
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  • Pages.140-143
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  • 2011
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  • 1225-1070(pISSN)
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  • 2508-4046(eISSN)
한국열처리공학회 (The Korean Society for Heat Treatment)
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전자빔 표면 조사에 따른 GZO 박막의 물성과 가스센서 응용 연구

Effect of Electron Irradiation on the Properties of GZO Thin Film and its Gas Sensor Application

  • 김대일 (울산대학교 공과대학 첨단소재공학부)
  • Kim, Dae-Il (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2011.04.18
  • 심사 : 2011.05.21
  • 발행 : 2011.05.30
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초록

In this work, Ga doped ZnO (GZO) films were prepared by radio frequency (RF) magnetron sputtering without intentional substrate heating on glass substrate and then the effect of the intense electron irradiation on structural and electrical properties and the NOx gas sensitivity were investigated. Although as deposited GZO films showed a diffraction peak for ZnO (002) in the XRD pattern, GZO films that electron irradiated at electron energy of 900 eV showed the higher intense diffraction peaks than that of the as deposited GZO films. The electrical property of the films are also influenced with electron's energy. As deposited GZO films showed the three times higher resistivity than that of the films irradiated at 900 eV In addition, the sensitivity for NOx gas is also increased with electron irradiation energy and the film sensor showed the proportionally increased gas sensitivity with NOx concentration. This approach is promising in gaining improvement in the performance of thin film gas sensors used for the detection of hazard gas phase.

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참고문헌

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