Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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A Study of a Changing of Physical and Chemical Intra-structure on Si-DLC Film during Tribological Test

실리콘 함유 DLC 박막의 마찰마모 시험에 의한 물리적 특성 및 화학적 결합 구조 변화 고찰

  • Kim, Sang-Gweon (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH)) ;
  • Lee, Jae-Hoon (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH)) ;
  • Kim, Sung-Wan (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH))
  • 김상권 (한국생산기술연구원 열표면연구부) ;
  • 이재훈 (한국생산기술연구원 열표면연구부) ;
  • 김성완 (한국생산기술연구원 열표면연구부)
  • Received : 2011.03.02
  • Accepted : 2011.04.19
  • Published : 2011.05.30
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Abstract

The silicon-containing Diamond-like Carbon (Si-DLC) film as an low friction coefficient coating has especially treated a different silicon content by plasma-enhanced chemical vapor deposition (PECVD) process at $500^{\circ}C$ on nitrided-STD 11 mold steel with (TMS) gas flow rate. The effects of variable silicon content on the Si-DLC films were tested with relative humidity of 5, 30 and 85% using a ball-on-disk tribometer. The wear-tested and original surface of Si-DLC films were analysed for an understanding of physical and chemical characterization, including a changing structure, via Raman spectra and nano hardness test. The results of Raman spectra have inferred a changing intra-structure from dangling bonds. And high silicon containing DLC films have shown increasing carbon peak ratio ($I_D/I_G$) values and G-peak values. In particular, the tribological tested surface of Si-DLC was shown the increasing hardness value in proportional to TMS gas flow rate. Therefore, at same time, the structure of the Si-DLC film was changed to a different intra-structure and increased hardness film with mechanical shear force and chemical reaction.

Keywords

References

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