Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication of 1 ㎛ Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method

  • Oh, Seung-Min (Electronic Materials Center, Korea Institute of Science and Technology, Department of Materials Science and Engineering, Korea University) ;
  • Kang, Min-Gyu (Electronic Materials Center, Korea Institute of Science and Technology) ;
  • Do, Young-Ho (Electronic Materials Center, Korea Institute of Science and Technology) ;
  • Kang, Chong-Yun (Electronic Materials Center, Korea Institute of Science and Technology) ;
  • Yoon, Seok-Jin (Electronic Materials Center, Korea Institute of Science and Technology) ;
  • Nahm, Sahn (Department of Materials Science and Engineering, Korea University)
  • Received : 2011.08.30
  • Accepted : 2011.10.10
  • Published : 2011.10.25
Download PDF
⟨ Previous Next ⟩

Abstract

Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/$SiO_2$/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 ${\mu}m$ were deposited by repetitive coating with successive third-step heat treatments at 150$^{\circ}C$, 350$^{\circ}C$ and 650$^{\circ}C$. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a $P_r$ of 40.5 ${\mu}C/cm^2$ and an $E_c$ of 156 kV/cm.

Keywords

References

  1. H. Chen, K. Udayakumar, C. Gaskey, and L. Cross, Appl. Phys. Lett. 67, 3411 (1995) [http://dx.doi.org/10.1063/1.115263].
  2. H. Adachi, T. Mitsuyu, O. Yamazaki, and K. Wasa, J. Appl. Phys. 60, 736 (1986) [http://dx.doi.org/10.1063/1.337423].
  3. J. F. Scott and C. A. Paz de Araujo, Science 246, 1400 (1989) [http://dx.doi.org/10.1126/science.246.4936.1400].
  4. J. Chen, K. Udayakumar, K. Brooks, and L. Cross, J. Appl. Phys. 71, 4465 (1992) [http://dx.doi.org/10.1063/1.350789].
  5. B. Noheda, D. Cox, G. Shirane, J. Gonzalo, L. Cross, and S. Park, Appl. Phys. Lett. 74, 2059 (1999) [http://dx.doi.org/10.1063/1.123756].
  6. J. F. Scott, Ferroelectric Memories (Springer, New York, 2000).
  7. I. Kanno, H. Kotera, K. Wasa, T. Matsunaga, T. Kamada, and R. Takayama, J. Appl. Phys. 93, 4091 (2003) [http://dx.doi.org/10.1063/1.1558951].
  8. E. Hong, J. C. Shin, J. Choi, C. S. Hwang, and H. J. Kim, J. Mater. Res. 15, 1284 (2000) [http://dx.doi.org/doi:10.1557/JMR.2000.0187].
  9. A. Masuda, Y. Yamanaka, M. Tazoe, Y. Yonezawa, A. Morimoto, and T. Shimizu, Jpn. J. Appl. Phys. 34, 5154 (1995) [http://dx.doi.org/10.1143/JJAP.34.5154].
  10. Y. Yamamoto, K. Kamiya, and S. Sakka, Yogyo-Kyokai-shi 90, 328 (1982). https://doi.org/10.2109/jcersj1950.90.1042_328
  11. Y. L. Tu and S. J. Milne, J. Mater. Res. 11, 2556 (1996) [http://dx.doi.org/doi:10.1557/JMR.1996.0321].
  12. H. Kozuka and M. Kajimura, J. Am. Ceram. Soc. 83, 1056 (2000) [http://dx.doi.org/10.1111/j.1151-2916.2000.tb01330.x].
  13. H. Kozuka, S. Takenaka, H. Tokita, and M. Okubayashi, J. Eur. Ceram. Soc. 24, 1585 (2004) [http://dx.doi.org/10.1016/s0955-2219(03)00402-3].
  14. H. Kozuka, J. Sol-Gel Sci. Technol. 40, 287 (2006) [http://dx.doi.org/10.1007/s10971-006-9213-x].
  15. T. Saegusa and Y. Chujo, J. Macromol. Sci. Part A: Chem. 27, 1603 (1990) [http://dx.doi.org/10.1080/00222339009351504].
  16. T. Saegusa and Y. Chujo, Makromol. Chem. Macromol. Symp. 64, 1 (1992). https://doi.org/10.1002/masy.19920640103

Cited by

  1. Formation and properties of porous films of lead zirconate titanate vol.57, pp.3, 2015, https://doi.org/10.1134/S1063783415030300
  2. Porous PZT Films Prepared by PVP Assisted Sol-Gel Process vol.484, pp.1, 2015, https://doi.org/10.1080/00150193.2015.1059680
  3. Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density vol.26, pp.6, 2017, https://doi.org/10.1109/JMEMS.2017.2728821
  4. Modification of microstructure on PZT films for ultrahigh frequency transducer vol.41, 2015, https://doi.org/10.1016/j.ceramint.2015.03.202