Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Study on the Adhesion of Diamond Like Carbon Films Using the Linear Ion Source with Nitriding Layers

Linear Ion Source에 의해 증착된 Diamond-Like Carbon(DLC) 박막의 질화층 형성에 따른 밀착력 특성 연구

  • 신창석 (부산대학교 공과대학 재료공학과) ;
  • 박민석 (한국생산기술연구원 동남권지역본부) ;
  • 권아람 (한국생산기술연구원 동남권지역본부) ;
  • 김승진 (한국생산기술연구원 동남권지역본부) ;
  • 정원섭 (부산대학교 공과대학 재료공학과)
  • Received : 2011.10.10
  • Accepted : 2011.10.28
  • Published : 2011.10.31
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Abstract

Diamond-like carbon (DLC) has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion on the metal substrates because of weak bonding between DLC film and the metal substrate. The purpose of this study is to enhance an adhesion of DLC film. For improving adhesion, the substrate was treated by active screen plasma nitriding before DLC film deposing. Nitrided substrates were investigated by Glow Discharge Spectrometer (GDS), Micro-Vickers Hardness. DLC films were deposited on several metals by linear ion source, and characteristics of the films were investigated using nano-indentation, Field Emission Scanning Electron Microscope (FESEM). The adhesion was measured by scratch tester. The adhesion of DLC films was increased when nitriding layer was formed before DLC deposition. Therefore, the adhesion of DLC film can be enhanced as increasing the hardness of materials.

Keywords

References

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