반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

레이저 산란 메커니즘 매개변수의 실험적 선정 및 태양전지 웨이퍼의 레이저산란패턴 분석에 관한 연구

Study on Experimental Selection of Parameters in Laser Scattering Mechanism and Analysis of Laser Scattering Patterns in Solar Cell Wafer

  • 김경범 (국립 충주대학교 항공기계설계학과)
  • Kim, Gyung-Bum (Aeronautical & Mechanical Design Engineering, Chungju National University)
  • 투고 : 2011.04.11
  • 심사 : 2011.05.31
  • 발행 : 2011.06.30
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

In this paper, a laser scattering mechanism are designed to detect micro defects such as dent, scratch, pinhole, etc. Its influential parameters are experimentally selected and scattering patterns of micro defects have been analyzed for silicon wafer in solar cell. As a result of experiments, scattered lights are rather increased in wafer surface with micro defects, in comparison to no micro ones. Scattering parameters are optimally selected for obtaining robust and high quality laser scattering images of micro defects. It is shown that scattered light components are linearly increased according to the increase of micro defect sizes, and the depth of micro-defects give a large influence on optical deflection.

키워드

참고문헌

  1. Anton B., "Stress Diagnostics and Crack Detection in Full-Size Silicon Wafers Using Resonance Ultrasonic Vibrations," Ph. D. Dissertation, University of South Florida, 2005.
  2. Tsai, D. M., Chang, C. C. and chao, S. M., "Micro-Crack Inspection in Heterogeneously Textured Solar Wafers using Anisotropic Diffusion," Image and Vision Computing, pp. 491-501, 2010.
  3. Takami, K., "Defect inspection of wafers by laser scattering," Materials Science and Engineering B, Vol. 44, No. 1-3, pp. 181-187, 1997. https://doi.org/10.1016/S0921-5107(96)01745-X
  4. Kim, G. B., "Study on Analysis of Optical Deflection of Laser Scattering Based on Rayleigh Criterion for Crystalline Silicon Wafer in Solar Cell," J. of the Semiconductor & Display Technology, Vol. 9, No. 4, pp.31-37, 2010.
  5. Kim, G.. B., "A Structured Mechanism Development and Experimental Parameter Selection of Laser Scattering for the Surface Inspection of Flat-Panel Glasses," International Journal of Production Research, Vol. 48, Issue 13, pp. 3911-3923, 2010.
  6. John, C. S., "Optical Scattering Measurement and Analysis 2nd Edition," SPIE Press, 1995.
  7. Roy, R. K., "Design of Experiments using the Taguchi Approach," John Wiley & Sons Inc., 2001.