한국인쇄학회지 (Journal of the Korean Graphic Arts Communication Society)
- 제29권3호
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- Pages.17-30
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- 2011
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- 1226-1149(pISSN)
Roll-to-Roll UV 나노 임프린팅 리소그래피에 의한 대면적 17인치의 나노 와이어 그리드의 제작
Fabrication of a 17inch Area Size Nano-Wire Grid using Roll-to-Roll UV Nano-Imprinting Lithography
- Huh, Jong-Wook (Miraenanotech. Co., Ltd.) ;
- Nam, Su-Yong (Dept. of Graphic Arts Information Engineering, Pukyong National University)
- 투고 : 2011.10.04
- 심사 : 2011.11.18
- 발행 : 2011.12.01
초록
The polarizer is an important optical element used in a variety of applications. Nano-wire grid polarizers in the form of sub-wavelength metallic gratings are an attractive alternative to conventional polarizers, because they provide high extinction ratio. This study has been carried out to fabrication of the 17inch area size nano-wire grid polarizer(NWGP) The master for NWGPs with a pitch of 200nm and the area size