Machining Performance of Optical Glass with Magnetorheological Fluid Jet Polishing

MR 유체 제트 연마를 이용한 광학유리의 가공성능

  • Kim, Won-Woo (Department of Mechanical Design Engineering, Korea Polytechnic Univ.) ;
  • Kim, Wook-Bae (Department of Mechanical Design Engineering, Korea Polytechnic Univ.)
  • 김원우 (한국산업기술대학교 기계설계공학과) ;
  • 김욱배 (한국산업기술대학교 기계설계공학과)
  • Received : 2011.02.10
  • Accepted : 2011.05.11
  • Published : 2011.08.01

Abstract

As a deterministic finishing process for the optical parts having complex surface, machining performance of the magnetorheological(MR) fluid jet polishing of optical glass are studied and compared with a general water jet polishing. First, design of the jet polishing system which has the special electromagnet-nozzle unit for stabilizing the slurry jet based on MR fluid and the change of jet shape as magnetic field is applied are explained. Second, for the BK7 glass, machining spot and its cross section profile are analyzed and the unique effect of MR fluid jet polishing is shown. Third, both material removal depth and surface roughness are explored in order to investigate the polishing performance of MR fluid jet. With the same ceria abrasives and amount in the polishing slurries, MR fluid jet shows superior machining performance compared to water jet and the difference of material removal mechanism and its resulting performance are described.

Keywords

References

  1. Yi, H. S., Yang, H. S. and Lee, Y. W., "Deterministic Pitch Tool Polishing Using Tool Influence Function," Hankook Kwanghak Hoeji, Vol. 19, No. 4, pp. 422-428, 2008. https://doi.org/10.3807/HKH.2008.19.6.422
  2. Yang, M. Y. and Lee, H. C., "A Study on PC-NC Based Aspherical Lens Polishing System with Minimum Translation Mechanism," Journal of the Korean Society of Precision Engineering, Vol. 18, No. 8, pp. 65-71, 2001.
  3. Horiuchi, O., Ikeno, J., Shibutani, H., Suzuki, H. and Mizkamid, Y., "Nano-abrasion machining of brittle materials and its application to corrective figuring," Precision Engineering, Vol. 31, No. 1, pp. 47-54, 2007. https://doi.org/10.1016/j.precisioneng.2006.02.005
  4. Evans, C. J., Paul, E., Dornfeld, D., Lucca, D. A., Byrne, G., Tricard, M., Klocke, F., Dambon, O. and Mullany, B. A., "Material Removal Mechanisms in Lapping and Polishing," CIRP Annals, Vol. 52, No. 2, pp. 611-633, 2003. https://doi.org/10.1016/S0007-8506(07)60207-8
  5. Braunecker, B., Hentschel, R. and Tiziani, H. J., "Advanced Optics Using Aspherical Elements," SPIE Press, pp. 41-54, 2008.
  6. Booij, S. M., Brug, H, Singh, M. and Braat, J. J. M., "Nanometer deep shaping with fluid jet polishing," Proceedings of SPIE, Vol. 4451, pp. 222-232, 2002.
  7. Kordonski, W. I. and Jacobs, S. D., "Magnetorheological Finishing," International Journal of Modern Physics B, Vol. 10, No. 23-24, pp. 2837-2848, 1996. https://doi.org/10.1142/S0217979296001288
  8. Tricard, M., Kordonski, W. I., Shorey, A. B. and Evans, C., "Magnetorheological jet finishing of conformal, freeform and steep concave optics," CIRP Annals, Vol. 55, No. 1, pp. 309-312, 2006. https://doi.org/10.1016/S0007-8506(07)60423-5
  9. Kordonski, W. I., Shorey, A. B. and Sekeres, A., "New magnetically assisted finishing method: material removal with magnetorheological fluid jet," Proceedings of SPIE, Vol. 5180, pp. 107-114, 2003.
  10. Sugiyama, K., Harada, K. and Hattori, S., "Influence of impact angle of solid particles on erosion by slurry jet," Wear, Vol. 265, No. 5-6, pp. 713-720, 2008. https://doi.org/10.1016/j.wear.2008.01.020
  11. Turenne, S. and Fiset, M., "Modeling of abrasive particle trajectories during erosion by a slurry jet," Wear, Vol. 162-164, No. 2, pp. 678-687, 1993.
  12. Brinksmeire, E., Riemer, O., Gessenharter, A. and Autschbach, L., "Finishing of structured surfaces by abrasive polishing," Precision Engineering, Vol. 30, No. 3, pp. 325-336, 2006. https://doi.org/10.1016/j.precisioneng.2005.11.012