DOI QR코드

DOI QR Code

MEMS 공정을 이용한 마이크로 PZT 외팔보 에너지 수확소자의 제작 및 특성

Fabrication and Characteristics of Micro PZT Cantilever Energy Harvester Using MEMS Technologies

  • 김문근 (고려대학교 제어계측공학과) ;
  • 황범석 (고려대학교 제어계측공학과) ;
  • 정재화 (고려대학교 제어계측공학과) ;
  • 민남기 (고려대학교 제어계측공학과) ;
  • 권광호 (고려대학교 제어계측공학과)
  • Kim, Moon-Keun (Department of Control and Instrumentation Engineering, Korea University) ;
  • Hwang, Beom-Seok (Department of Control and Instrumentation Engineering, Korea University) ;
  • Jeong, Jae-Hwa (Department of Control and Instrumentation Engineering, Korea University) ;
  • Min, Nam-Ki (Department of Control and Instrumentation Engineering, Korea University) ;
  • Kwon, Kwang-Ho (Department of Control and Instrumentation Engineering, Korea University)
  • 투고 : 2011.02.25
  • 심사 : 2011.05.24
  • 발행 : 2011.06.01

초록

In this work, we designed and fabricated a multilayer thin film Pb(Zr,Ti)$O_3$ cantilever with a Si proof mass for low frequency vibration energy harvesting applications. A mathematical model of a mu lti-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. W e fabricated a device with beam dimensions of about 4,930 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 12 ${\mu}M$, and an integrated Si proof mass with dimensions of about 1,410 ${\mu}M$ ${\times}$ 450 ${\mu}M$ ${\times}$ 450 ${\mu}M$. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 84.5 Hz, 88 mV, and 0.166 ${\mu}Wat$ 1.0 g and 23.7 ${\Omega}$, respectively. The dimensions of the cantilever were determined for the resonance frequency of the cantilever.

키워드

참고문헌

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피인용 문헌

  1. A Study on the Dynamic Characteristics of TPMS Piezoelectric Element using Finite Element Method vol.30, pp.12, 2013, https://doi.org/10.7736/KSPE.2013.30.12.1341